Single crystal of lithium niobate or tantalate and its optical element, and process and apparatus for producing an oxide single crystal

ABSTRACT

A single crystal of lithium niobate or lithium tantalate may be grown from a melt of a composition having a molar excess of Li compared to a melt having the stoichiometric amount of lithium, and having a molar fraction of Li2O/(Nb2O5+Li2O) or Li2O/(Ta2O5+Li2O) within a range of at least 0.490 and less than 0.500. The single crystal also has at least one element selected from the group consisting of Mg, Zn, Sc and In, in an amount of from 0.1 to 3.0 mol % based on the total amount of the elements, Nb and Li, or the total amount of the elements, Ta and Li.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a single crystal of lithium niobate ortantalate for optical use and its production method, an optical elementusing the single crystal and its production method. Particularly, itrelates to a production method for stable growing a single crystal ofits stoichiometric composition, which has excellent physical propertiesand which is used for an element utilizing polarization inversion, froma melt having a high Li concentration.

The present invention further relates to a process and an apparatus forproducing an oxide single crystal by using a noble metal crucible of adouble crucible structure. Particularly, it relates to a process and anapparatus for producing an oxide single crystal for stably growing ahigh quality and longitudinal crystal by rotation pulling.

2. Discussion of Background

Functional optical single crystals of which optical characteristics canbe controlled by an information signal from outside such as electricity,light of stress, are now essential materials in various optoelectronicsfields including optical communication, recording, measurement andoptical-optical control. Particularly with respect to a certain singlecrystal of an oxide, the interaction between the optical characteristicsand external factors is significant, and it is thereby used as afrequency-conversion element utilizing the nonlinear optical effect, oras an optical element utilizing the electrooptical effect, such as anelectrooptical light modulator, a switch or a reflector.

Such a crystal is used as an element as it is originally grown, in manycases. However, with respect to some ferroelectric crystals, thedirections of the dielectric polarization can be inverted by applyingvoltage thereto without destroying the crystals, and accordingly, theirfunctions have been increased by inverting the polarizationperiodically.

For example, with respect to a frequency-conversion element, thewavelength can be converted by means of quasi-phase-matching (QPM) byperiodically inverting the domain structure of the ferroelectricpolarization. This method is effective from the viewpoint that theconversion can be carried out with a high efficiency at a widewavelength range, and it is thereby expected as a frequency-conversionelement to realize a laser light source having a wide range ofwavelength covering from the ultraviolet and visible light region to theinfrared light region, which is strongly desired in fields includingoptical communication, recording, measurement and medical care.

Further, with respect to an electrooptical element, according to a knownliterature (M. Yamada et al., Appl. Phys. Lett., 69, page 3659, 1996),an attention has been drawn to a cylindrical lens, a beam scanner and aswitch, and an optical element forming a polarization inversionstructure of a lens or a prism in a ferroelectric crystal, andpolarizing laser light transmitted therethrough by utilizing theelectrooptical effect, as new optical elements.

A single crystal of LiNbO₃ or LiTaO₃ (hereinafter referred to simply asLN single crystal or LT single crystal, respectively) is a ferroelectricwhich is used mainly as a substrate for a surface elastic wave elementor for an electrooptical light modulator. It is transparent at a widewavelength range of from the visible region to the infrared region, itcan form a periodic polarization structure by applying voltage, it hasoptical nonlinearity and electrooptical characteristics which arepractical to some extent, and further, a single crystal having a largediameter and a high composition homogeneity can be provided at arelatively low cost. Accordingly, an attention has been drawn to the LNsingle crystal or the LT single crystal also as a substrate for afrequency-conversion element by the above-mentioned QPM (hereinafterreferred to simply as QPM element) or for an electrooptical element.

Heretofore, the LN single crystal available has been limited to one ofthe congruent melting composition with a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of 0.485, containing nonstoichiometric defects of alevel of several percent, including the substrate for a surface acousticwave element, since the phase diagram of the LN single crystal has beenknown for a long time, and it has been conventionally considered that toproduce a LN single crystal having a high composition homogeneity, it ispreferred to grow the single crystal by rotation pulling from a meltwith a molar fraction of Li₂O/(Nb₂O₅+Li₂O) of 0.485, which is of thecongruent melting composition wherein the crystal and the melt arecoexist in equilibrium state with the same composition. Further, asshown in a known literature (D. A. Bryan et al. Appl. Phys. Lett. 44,page 847, 1984), Mg is added in an amount of at least 4.5 mol % to theLN crystal of the congruent melting composition, with a purpose ofincreasing optical damage resistance. For the LT single crystalavailable has been limited to one of the congruent melting compositionwith a molar fraction of Li₂O/(Ta₂O₅+Li₂O) of 0.483, containingnonstoichiometric defects of a level of several percent, including thesubstrate for a surface acoustic wave element, since it has beenconventionally considered that to produce a LT single crystal having ahigh composition homogeneity, it is preferred to grow the single crystalby rotation pulling from a melt with a molar fraction ofLi₂O/(Ta₂O₅+Li₂O) of 0.483, which is of the congruent meltingcomposition wherein the crystal and the melt are coexist in equilibriumstate with the same composition. Further, as shown in a known literature(F. Nitanda et al. Jpn. J. Appl. Phys. 34, page 1546, 1995), Mg is addedin an amount of a level of several mol % to the LT crystal of thecongruent melting composition, with a purpose of increasing opticaldamage resistance or shortening the cut-off wavelength. However, it hasbeen known that the LT single crystal has a relatively high opticaldamage resistance even without Mg addition, as compared with the LNsingle crystal, and an adequate effect of improving the optical damageresistance by Mg addition is not always obtained.

In order to realize the QPM element, it is important to prepare a smallelement having a high efficiency. Downsizing and obtaining highefficiency of the element are significantly dependent on thecharacteristics of the material to be used, i.e. the materialcharacteristics which the crystal essentially has, although they aregreatly dependent on also the structure of the element. For example, theconversion efficiency of the QPM element is in proportion to the squareof the nonlinear optical constant and the interaction length, and is inproportion to the fundamental wave power density. The interaction lengthand the fundamental wave power density are determined by the elementdesign or accuracy of the preparation process, and may be increased bye.g. improvement of techniques. On the other hand, the nonlinear opticalconstant is a material characteristic which the material essentiallyhas. Since LN is one of the most popular nonlinear optical materials, alarge number of measurements of the nonlinear optical constant have beencarried out for a long time. Of the LN crystals of the congruent meltingcomposition which have been reported so far, the nonlinear opticalconstant d₃₃ has been said to be usually from about 27 to about 34 pm/Vat a wavelength of 1.064 μm. However, the difference among reportedvalues is surprisingly large, and it is twice between the highest andthe smallest. These values are obtained by a relative measurement forobtaining the ratio in the nonlinear optical constant with a referencesubstance. However, the absolute value of the reference substance itselfis not determined, and researchers use different values, and thedifference is thereby so large. In the conventional measurement methods,the absolute value of the reference substance is based on the valueobtained by absolute measurement for directly measuring the absolutevalue of the nonlinear optical constant. However, there is a significantdifference in the obtained value between second harmonic generation(SHG) method and parametric fluorescence (PF) method which arerepresentative absolute measurement methods. For example, d₁₁ of quartzis 0.3 pm/V according to the absolute value scale based on SHG method,whereas it is 0.5 pm/V based on PF method, at a fundamental wavelengthof 1.064 μm. The absolute value of the nonlinear optical constant hasbeen inadequate, and according to a known literature (I. Shoji et al.,J. Opt. Soc. Am. B, 14, page 2268, 1997) for example, it has been knownby careful absolute measurements by both SHG method and PF method, thatthe values by PF method which have been reported so far, wereoverestimated since e.g. influences of stray light at the time ofmeasurement can not be completely excluded, and the same value can beobtainable essentially by either method. Recently, the absolute valuehas, at long last, become to be measured with a high accuracy, and withrespect to the LN crystal of the congruent melting composition,including one having Mg added thereto, the nonlinear optical constantd₃₃ has been corrected and reported to be from 24.9 to 25.2 pm/V.Further, with respect to the LT crystal of the congruent meltingcomposition, d₃₃ based on fundamental wave having a wavelength of 1.064μm, has been reported to be 13.8 pm/V according to the known literature(I. Shoji et al., J. Opt. Soc. Am. B, 14, page 2268, 1997).

Further, in the case of using the LN single crystal or LT single crystalfor an electrooptical element, a high electrooptical constant isdesired. The LN or LT single crystal has begun to be used as a materialof the substrate for an optical element utilizing various electroopticaleffects, since a single crystal having a high quality and a largediameter can be stably produced at a low cost, although theelectrooptical constant of the single crystal itself is not particularlyhigh among ferroelectric single crystals. The electrooptical constant ofthe LN or LT single crystal has been measured usually by means ofMach-zender interferrometer. With respect to the LN single crystal ofthe congruent melting composition which has conventionally been used,the electrooptical constants r₁₃ and r₃₃ have been reported to be about8.0 pm/V and about 32.2 pm/V, respectively. With respect to the LTsingle crystal of the congruent melting composition which hasconventionally been used, the electrooptical constants r₁₃ and r₃₃ havebeen reported to be about 8.0 pm/V and about 32.2 pm/V, respectively.Accordingly, the structure of the element using the single crystalhaving a high electrooptical constant r₃₃, has a significant merit fordownsizing and obtaining high efficiency of the element.

In recent years, studies to reduce the nonstoichiometric defects in theLN or LT single crystal of the congruent melting composition, i.e.studies to make the crystal composition ratio to be in the vicinity ofthe stoichiometric, has clarified that the nonstoichiometric defectsdecrease the nonlinear optical constant that the LN crystal essentiallyhas, and besides, increase the applied voltage necessary for preparing aperiodic polarization structure. For example, according to knownliterature (V. Gopalan et al. Appl. Phys. Lett. 72, page 1981, 1998),the polarization inversion voltage can be decreased to be at most 5kV/mm by making the crystal composition to be in the vicinity of thestoichiometric composition. Likewise, the studies have been clarifiedthat the nonstoichiometric defects increase the optical characteristicsthat the LT crystal essentially has, and applied voltage required forpreparing a periodic polarization structure. For example, according toJP-A-11-35393, the photorefractive characteristic and the transmittancecharacteristic of light can be improved by making the crystalcomposition to be in the vicinity of the stoichiometric composition.Further, another known literature (K. Kitamura et al. Appl. Phys. Lett.73, page 3073, 1998) reports that the polarization inversion voltage canbe decreased to be a level of from 1.5 to 1.7 kV/mm by making thecrystal composition to be in the vicinity of the stoichiometriccomposition.

Further, in order to practically utilize the LN single crystal of thestoichiometric composition, studies with respect to its growing methodhave been extensively made. For example, according to known literature(G. I. Molovichiko et al. Appl. Phys. A, 56, page 103, 1993), the LNcrystal having a small defect density and a composition in the vicinityof the stoichiometric composition, can be obtained by growing thecrystal from a melt of the congruent melting composition or thestoichiometric composition, having at least 6 mol % of K₂O addedthereto. Further, in order to practically utilize the LT single crystalof the stoichiometric composition, studies with respect to its growingmethod have been extensively made. For example, JP-A-11-35393 proposesthat the LT crystal having a small defect density and a composition inthe vicinity of the stoichiometric composition, can be obtained bygrowing the crystal from a melt of the congruent melting composition orthe stoichiometric composition, having at least 6 mol % of K₂O addedthereto.

From a phase diagram of Li₂O and Nb₂O₅ as shown in FIG. 2, it is knownthat a crystal having a molar fraction of Li₂O/(Nb₂O₅+Li₂O) in thevicinity of 0.500 can be grown by making the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of the melt for growing to be from 0.58 to 0.60.However, as shown in the phase diagram, the melt composition ratio isextremely close to the eutectic point, and in the case where a crystalof a composition in the vicinity of the stoichiometric composition isgrown from a melt of a composition having a higher Li concentration overthe stoichiometric composition, the excessive Li component remains in acrucible along with the deposition of the crystal, and the compositionratio of Li and Nb in the melt gradually changes, whereby the meltcomposition ratio achieves the eutectic point soon after the initiationof the growing. Accordingly, in a case of employing Czochralski method(hereinafter referred to simply as CZ method) which has conventionallybeen used as a means of industrial mass production of a LN crystalhaving a large diameter, the solidification ratio of a crystal of thecomposition in the vicinity of the stoichiometric composition is as lowas a level of 10%. Likewise, according to known literature (K. Kitamuraet al. Appl. Phys. Lett. 73, page 3073, 1998), a crystal having a molarfraction of Li₂O/(Ta₂O₅+Li₂O) in the vicinity of 0.5 can be grown bymaking the molar fraction of Li₂O/(Ta₂O₅+Li₂O) of the melt for growingto be from 0.58 to 0.59. However, from a phase diagram as shown in knownliterature (S. Miyazawa et al. J. Crystal Growth 10, page 276, 1971),the melt composition ratio is extremely close to the eutectic point, andin a case where a crystal of a composition in the vicinity of thestoichiometric composition is grown from a melt of a composition havinga higher Li concentration over the stoichiometric composition, theexcessive Li component remains in a crucible along with the depositionof the crystal, and the composition ratio of Li and Ta in the meltgradually changes, whereby the melt composition ratio reaches theeutectic point soon after the initiation of the growing. Accordingly, inthe case of using CZ method which have been conventionally used forindustrial mass production of a LT crystal having a large diameter, thesolidification ratio of the crystal is estimated to be as low as a levelof 10%.

In order to raise this low solidification ratio, JP-A-10-274047 proposesa method of growing while continuously supplying starting material(hereinafter referred to simply as continuous supply method.Specifically, in the above method, the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) in the melt for growing is adjusted to be from 0.585to 0.595, a crucible having a double structure is employed, a crystal ispulled up from an inner crucible, and the weight of the crystal beingpulled up is measured at all times to obtain the growth rate, and apowder having the same component as the crystal is continuously suppliedbetween an outer crucible and the inner crucible in the same amount assaid rate. By employing this method, a longitudinal crystal may begrown, and the crystal solidification ratio of 100% based on the amountof supplied material will be realized. Likewise, in order to raise thislow solidification ratio, a continuous supply method has been reported,for example, by a known literature (Y. Furukawa et al. J. Crystal Growth197, page 889, 1999). Specifically, in the method, the molar fraction ofLi₂O/(Ta₂O₅+Li₂O) in the melt for growing is adjusted to be from 58.0 to59.0, a crucible having a double structure is employed, a crystal ispulled up from an inner crucible, and the weight of the crystal beingpulled up is measured at all times to obtain the growth rate, and apowder having the same component as the crystal is continuously suppliedbetween an outer crucible and the inner crucible in the same amount assaid rate. By employing this method, a longitudinal crystal may begrown, and the crystal solidification ratio of 100% based on the amountof supplied material will be realized.

Further, the LN or LT single crystal is often used as a QPM element. Asan important process technique to obtain a high efficiency, a techniqueof producing a periodic polarization inversion domain with a highaccuracy may be mentioned. Namely, in order to obtain the maximumnonlinear optical characteristics, the ratio of the width of thepolarization inversion (hereinafter referred to simply as polarizationinversion width) is made to be 1:1. The polarization inversion widthvaries depending upon the phase matching wavelength of afrequency-conversion element to be obtained. For example, with respectto phase matching at a longer wavelength in e.g. the infrared region,the polarization inversion width is several tens μm. The polarizationinversion voltage of the LT single crystal of the congruent meltingcomposition is said to be at least 21 kV/mm according to knownliterature (K. Kitamura et al. Appl. Phys. Lett. 73, page 3073, 1998).Further, the polarization inversion voltage of the LN single crystal ofthe congruent melting composition is said to be at least 21 kV/mm.

The LN or LT single crystal of the congruent melting composition is acrystal having a high non-linearity, among existing nonlinear opticalcrystals. However, its non-linearity is still inadequate in the case ofpractically preparing an element. Along with improvement of the level ofperformance of element design and improvement of accuracy in thepreparation process in recent years, a significant improvement of theelement characteristics will no longer be expected only by improving theprocess, and it has thereby been desired to make the constant d itselfto be a higher value.

However, it has been gradually found that crystal growing method ofpulling up the crystal from a melt having a higher Li concentration overthe congruent melting composition by means of continuous supply method,has a significant problem in the yield from the industrial viewpoint.Namely, the present inventors have found that the composition of thegrowing crystal greatly depends on the composition ratio of the melt, inthe case of using a melt having a high Li concentration, different fromthe case where a crystal is grown from a melt of the congruent meltingcomposition. This means that it is necessary to grow a crystal from amelt having the same composition ratio always kept, in order to grow acrystal having uniform optical characteristics and good opticalhomogeneity with a high reproducibility. In the case of LN or LTcrystal, the nonlinear optical constant, the voltage required forforming a periodic inversion structure, and the electrooptical constant,are sensitive to the crystal composition ratio, and accordingly, inorder to obtain maximum properties, the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of the crystal to be extremelyclose to 0.500.

For example, the continuous supply method has such a characteristic thatthe composition can be excellently controlled from the initiation untilthe completion of the growing, however, the determination of thecomposition ratio of the melt at the initiation of the growing is veryimportant, and if the initial setting is different from the desiredcomposition of the melt, the nonlinear optical constant d₃₃ or theinversion voltage required for the entire grown crystal is notsatisfied. To prevent such, it is possible to correct the deviation bypulling up a small crystal before the growing, confirming thecomposition ratio of the melt from the composition ratio of the crystal,and adding insufficient component. However, it takes at least severaldays to grow the small crystal and confirm its composition ratio,whereby the productivity will significantly decrease. Further, althoughthe continuous supply method is an extremely effective method forcomposition control, a slight amount of the material may evaporate fromthe surface of the melt kept to be at a high temperature, in the casewhere the growing time is so long as a level of from several days to aweek. The change of the crystal composition with time due to theevaporation, can not be ignored in the case where it is required to growa crystal of the stoichiometric composition wherein the composition iscontrolled to be completely homogeneous. It is extremely difficult togrow a crystal having the same characteristics with a high yield, due tothis deviation of the crystal composition, and accordingly, thetechnique to grow a LN or LT single crystal of the completelystoichiometric composition and having no defect, from a melt having ahigh Li concentration, has not been put to practical use industrially.

Further, it is extremely difficult to completely form a polarizationinversion width ratio of 1:1 with a high reproducibility, with the LN orLT crystal of the congruent melting composition. Namely, by voltageapplying method, a periodic electrode is provided on one side of the LNor NT single crystal of the congruent melting composition of z-cut, anda uniform electrode is provided on the opposite side, and pulse voltageis applied through these electrodes, for polarization inversion at thepart directly under the periodic electrode, toward the z-axis direction.However, the inversion polarization width and the electrode width arenot always the same, and the preparation error is significant. Further,there are such problems that the polarization inversion widths aredifferent between both sides of the z-cut crystal or the inversion maybe broken during the formation of the polarization inversion toward thez-axis direction on the opposite side, whereby an ideal polarizationinversion width range has not been obtained.

The polarization inversion width required for phase matching is about 3μm for a use for shorter wavelength ranging from the visible region tothe ultraviolet region, and an element for shorter wavelength is moredifficult to prepare as compared with an element for longer wavelength.However, even with respect to a QPM element for longer wavelength, whichcan be relatively easily produced, an ideal element has not beenachieved yet. One reason is a high applied voltage required for thepolarization inversion of the LN or LT single crystal of the congruentmelting composition (hereinafter referred to simply as polarizationinversion voltage). The polarization inversion voltage is so high as atleast 21 kV/mm, and this high inversion voltage makes it difficult toform a complete polarization inversion in a case where the thickness ofthe substrate is at least 0.5 mm, and no polarization having a goodaccuracy, capable of realizing an element, has not been produced if thethickness is at least 1.0 mm, although a polarization inversion gratingmay be formed on the entire substrate when the thickness is less than0.5 mm. Further, even if the thickness of the substrate is less than 0.5mm, a polarization inversion period of several μm, for shorterwavelength, has not been realized. Particularly in the case of a LNcrystal of the congruent melting composition having at least 5 mol % ofMgO added thereto, since the internal electric field is high, thehysteresis curve (P-E curve) of the ferroelectric has poor symmetry, andfurther, since the rising of the P-E curve is gentle and not steep nearthe anti-electric field, the inversion of spontaneous polarization maybe poorly controlled when electric field in the direction opposite tothe spontaneous polarization is applied thereto from the outside.Further, in the case of the LN crystal of the congruent meltingcomposition having at least 5 mol % of MgO added thereto, the electricresistance will decrease by at least about 3 to 4 orders of magnitude,as compared with a case where no MgO is added, and accordingly, it willbe difficult to subtly control the applying voltage, and it will be moredifficult to make the polarization inversion width ratio to be 1:1. Itis said that this problem may be overcome by employing corona dischargemethod for polarization inversion, however, the problem in the thicknessof the sample for the polarization inversion has still been unsolved.Likewise, in the case of a LT crystal of the congruent meltingcomposition having MgO added thereto, since the internal electric fieldis high, the P-E curve of the ferroelectric has poor symmetry, andfurther, since the rising of the P-E curve is gentle and not steep nearthe anti-electric field, the inversion of spontaneous polarization maybe poorly controlled when electric field in the direction opposite tothe spontaneous polarization is applied thereto from the outside.Further, in the case of the LT crystal of the congruent meltingcomposition having MgO added thereto, the electric resistance willdecrease as compared with a case where no MgO is added, and accordingly,it will be difficult to subtly control the applying voltage, and it willbe more difficult to make the polarization inversion width ratio to be1:1.

With respect to an electrooptical light modulator utilizing theelectrooptical effect of a ferroelectric single crystal, an opticalelement having a polarization inversion structure of a lens or a prismformed on the LN or LT single crystal and polarizing laser lighttransmitted therethrough by utilizing the electrooptical effect, and acylindrical lens, a beam scanner and a switch, it is important toprepare a small element having a high efficiency, to realize a newoptical element. Also with respect to such an element utilizing theelectrooptical effect, downsizing and obtaining high efficiency greatlydepend on the characteristics of the material to be used, although theydepend also on accuracy in preparation of the element structure. Forexample, performances of an optical element utilizing the electroopticaleffect of the LN or LT single crystal having an inversion of therefractive index formed by the polarization inversion structure, aredetermined by the design of the polarization inversion structure of alens or a prism, accuracy of the process for preparing the polarizationinversion structure, and the electrooptical constant which the materialhas. With respect to the conventional LN or LT crystal of the congruentmelting composition, it has been difficult to control the polarizationinversion structure, since a high applied voltage is required forpolarization inversion. Further, the electrooptical constant is acharacteristic which the material essential has, and is considered to bedifficult to improve in the same crystal. Further, the optical damagemay be a big problem depending on the wavelength or the intensity of thelight to be used, and in such a case, a crystal having at least 5 mol %of MgO added to the LN single crystal of the congruent meltingcomposition, was expected to be excellent in optical damage resistance.However, such a crystal has a problem in material characteristics thatthe inversion of the spontaneous polarization is poorly controlled inthe same manner as the preparation of the QPM element, wherebypreparation of a polarization inversion structure of a lens or a prismhaving a good accuracy has not been realized. Further, although the LTsingle crystal of the congruent melting composition is believed to havea higher optical damage resistance than the LN single crystal, theoptical damage may be a big problem depending upon the wavelength or theintensity of the light to be used. Even a crystal having at least 5 mol% of MgO added to the LT crystal of the congruent melting compositionhas insufficient optical damage resistance, and due to problems inmaterial characteristics that the inversion of the spontaneouspolarization will be poorly controlled in the same manner as thepreparation of the QPM element, preparation of a polarization inversionstructure of a lens or a prism having a good accuracy has not beenrealized.

SUMMARY OF THE INVENTION

The present inventors have conducted extensive studied to accomplish theabove objects, and as a result, they have found the following. Namely,by adding to a melt at least one element selected from the groupconsisting of Mg, Zn, Sc and In, having substantially no absorption atthe visible light region, in a total amount of from 0.1 to 3 mol % basedon the total amount of the at least one element, Nb and Li, or the totalamount of the at least one element, Ta and Li, a small polarizationinversion voltage can be obtained without decreasing the nonlinearoptical constant d₃₃ and the electrooptical characteristic r₃₃, thedefects of Li can be compensated by said third element, and even with asingle crystal of lithium niobate or tantalate having a certain level ofnonstoichiometric defects, although having a composition in the vicinityof the stoichiometric composition, the same nonlinear optical constant,applied voltage required for preparing the periodic polarizationstructure, and electrooptical constant, as those of the perfect LN or LTsingle crystal having a molar fraction of Li₂O/(Nb₂O₅+Li₂O) orLi₂O/(Ta₂O₅+Li₂O) of 0.500, can be obtained; and further, this means iseffective for a wide range of single crystals having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of at least 0.490 and less than0.500, and the present invention has been accomplished on the basis ofthese discoveries.

Czochralski method (CZ method) has been conventionally known as a methodfor growing a large single crystal of high quality. The CZ method is amethod for producing a single crystal suitable for growing a largecrystal of the congruent melting composition, wherein a seed crystal iscontacted with a melt filled in a crucible, and the seed crystal ispulled upward while being rotated, for growing a single crystal belowthe seed crystal.

This method is now most commonly used industrially, for both oxidesingle crystal and semiconductor single crystal. However, when it isattempted to grow a longitudinal single crystal having a larger diameterat a low cost, the capacity of the crucible is limited, and accordingly,continuous pulling method of supplying a material into the cruciblewhile pulling the single crystal up, has been devised, and variousmethods have been tried, including double crucible method.

This method is to produce a single crystal by employing such a structurethat in the usual crucible, another crucible or cylinder having anopening for melt flow and having a small inner diameter, is arranged,wherein the outer crucible is for supplying a material, and the singlecrystal is pulled up from the inner crucible and grown (JP-A-57-183392,JP-A-47-10355).

For growing a semiconductor crystal such as Si or GaAs, a method ofintroducing a material in an amount corresponding to the degree ofgrowth to the outer crucible when the single crystal being pulled up hasgrown to have a predetermined diameter, and its practical use is beingconsidered. However, this is mainly for uniform addition of a dopant toobtain a longitudinal single crystal or to homogenize the materialcharacteristics in the production of the semiconductor single crystal(JP-A-63-95195, Japanese Patent No. 2729243).

Also in the case of an oxide single crystal, a method for producing acrystal by means of a double crucible, similar to the production of asemiconductor single crystal, has been proposed. The method is mainlyfor growing a crystal of a composition different from the composition ofthe melt, which is difficult to grow by the CZ method on principle, andthe method is expected to be excellent and being developed.

For example, a method is known for producing a crystal at a constantrate with the temperature and the composition of the material melt keptto be constant, by supplying material pellets between the outer crucibleand the inner crucible, in order to overcome the low growth efficiencyor variation of the crystal growth condition due to decrease intemperature and height of the melt required for the progress of thecrystal growth, which have been problems in TSSG method which is one ofsolution pulling methods (JP-A-4-270191).

FIG. 4 is a schematic diagram illustrating a double crucible method ofmaterial supply type, which has been developed to make the pulling rateof a lifting and lowering head 7 by a crystal pulling shaft 6 and thefalling rate of a melt 9 to be constant, by supplying material pellets10 between an outer crucible 2 and an inner crucible 3 at a constantrate. In this method, several problems in the TSSG method have beenovercome. In this method, a heater 4 is arranged at the outside of adouble crucible 1, and the inner crucible 3 is provided with large holes12, and a single crystal 11 is grown from a seed crystal 8 whiledropping the material pellets 10 to the material melt 9 between theouter crucible 2 and the inner crucible 3 through a supply tube 5.

Further, a method for producing an oxide single crystal of high quality,by employing a noble metal crucible having a double structure, whichfunctions also as a container generating heat by high frequencyinduction heating, to minimize the change of the temperature of the meltdue to heating by the high frequency induction of the crucible, has beenknown, although the material is not supplied in this method, in order toovercome the problem of the change of the temperature during the growingof a crystal of the congruent melting composition wherein thecompositions of the melt and the grown crystal are the same(JP-A-4-74790).

FIG. 5 is a schematic diagram illustrating the above method employing adouble crucible made of a noble metal. A melt 15 of an oxide is put inan outer crucible 13, and in the outer crucible 13, a cylinder 14 havinga smaller diameter than the inner diameter of the outer crucible 13 isarranged, however, this is to stabilize the temperature of the melt, anda means of supplying a material for growing a longitudinal crystal isnot arranged. Further, in order to grow a crystal as long as possible,the shape of the outer crucible 13 is such that its height issubstantially the same as or higher than its diameter.

Further, in order to grow a LiNbO₃ single crystal of the stoichiometriccomposition having a molar fraction of Li₂O/(Nb₂O₅+Li₂O) of 0.50, whichcan not be grown by the conventional CZ method, a method for producing asingle crystal employing a double crucible, wherein a melt of acomposition having an excessive Li component with a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of from 0.58 to 0.60 is preliminarily prepared in theinner crucible, a crystal of the stoichiometric composition is depositedtherefrom, and an apparatus for continuously supplying a material powderprepared to have the same stoichiometric composition as the depositedcrystal at the same time as the deposition of the crystal, is arranged,has been developed, and LiNbO₃ single crystals having a homogeneouscomposition over the entire crystal, and having a composition in thevicinity of the stoichiometric composition, have been grown (K. Kitamuraet al., Journal of Crystal Growth vol. 116, 1992, pages 327-332; OyoButsuri (Applied Physics) vol. 65, No. 9, 1996, pages 931-935).

FIGS. 6 and 7 are schematic diagram illustrating the above method. Thechange of the growth weight per unit time is measured by a load cell (52in FIG. 6 or 27 in FIG. 7) for detecting the weight of the crystal, anda material powder in an amount corresponding to this change is suppliedbetween an outer crucible (56, 19) and an inner crucible (55, 20)through a material supply tube (53, 22) arranged in such a manner thatthe angle to the vertical is from 65 to 76°. In either apparatus, thematerial is supplied automatically, and the supply amount of thematerial in a container for preserving the material is controlled by apiezo oscillator 54 in FIG. 6, or by a screw in FIG. 7.

Here, the diameter of the crystal to be grown is from about 1 to about1.5 inches, and the shapes of the inner crucible and the outer crucibleto be used for growing are such that the ratio of the diameter of theinner crucible to the diameter of the outer crucible is 0.5. Further,the crucible is not rotated in the apparatus shown in FIG. 6, and in theapparatus shown in FIG. 7, the crucible is extremely slowly rotated at alow rate of from about 0.1 to about 0.3 rpm in the direction opposite tothe rotation of the crystal, for growing crystal, with a purpose ofhomogenizing the supplied material and the melt.

In the above method for producing an oxide single crystal which hasconventionally been known, what is significantly different from themethod for producing a semiconductor single crystal, is that a noblemetal crucible which will not react with the melt is used for growingthe crystal, and the weight of the material to be automatically suppliedto the outer crucible has to be more precisely controlled since theamount of the crystal growth per unit time is small.

Accordingly, it is one of big problems to be overcome from industrialviewpoint to develop technique for growing a large and longitudinalcrystal by using a crucible as small as possible, and to develop agrowing technique by which the crucible can be used many times, sincethe noble metal crucible is likely to be deformed and it is extremelyexpensive.

As mentioned above, in the case where a crystal is grown withoutsupplying the material, as shown in FIG. 5, there is a limit to makingthe crystal longitudinal. To grow a longitudinal crystal, it isnecessary to prepare a crucible having a large diameter and to melt alarge amount of the material. However, the crystal can not be madelonger than the amount corresponding to the weight of the materialpreliminarily charged, and the noble metal crucible is extremelyexpensive, and accordingly the crystal will be rather costly, and themerit of the growing at a low cost by making the crystal longitudinalwill be offset.

Further, in this case, the height of the surface of the melt decreasesalong with the progress of the growth, and thermal growth environmentwill gradually change, whereby the crystal growth interface may change,and accordingly, deterioration in quality is caused such as introductionof unfavorable crystal defects or distortion of the crystal. Such aproblem can not be overcome even when a noble metal crucible with adouble structure is employed, in the case where the material is notsupplied in an amount corresponding to the weight of the grown crystal.

Accordingly, as shown in FIGS. 6 and 7, the double crucible method withmaterial supply has been developed as a method to overcome the aboveproblems, however, several problems has been found. For example, in thismethod, by employing a double crucible structure, the change in thetemperature of the melt in the inner crucible can be made small, wherebydefects such as growth striations observed in the obtained singlecrystal can be decreased, such being advantageous; on the other hand,the temperature gradient of the melt in the inner crucible in thediameter direction will be extremely gentle, and the shape of thecrystal growth interface will be significantly different from oneobtained by using a conventional single crucible, whereby it will bedifficult to control the crystal growth interface and the crystaldiameter which are important to grow a crystal of high quality.

FIG. 7 illustrates an example wherein the crystal growth interface isconvex to the melt, and the crystal diameter can be well controlled.However, the growth interface is closely related with the relationbetween the size of the growing crystal and the size of the innercrucible, the thermal conductivity of the crystal, and the presence orabsence of a dopant, and accordingly, in the case where the temperaturegradient of the melt in the inner crucible in the diameter direction isextremely gentle, some device is required to control the shape of thecrystal growth interface to be flat or convex to the melt. However, evenif the conventional rotation of the crucible is carried out with apurpose of homogenizing the melt, no effect of forcibly controlling thegrowth interface can be obtained with an extremely slow rotation in theopposite direction to the rotation of the crystal at a low rate of fromabout 0.1 to about 0.3 ppm.

Further, with respect to the known methods for producing a singlecrystal by using a double crucible, as shown in FIGS. 4 and 5, the shapeof the outer crucible is such that its diameter is substantially thesame as the height of the crucible, and in the outer crucible, acrucible or a cylinder having a diameter and a height smaller than theouter crucible, having a hole, and called an inner crucible, isarranged.

It has been known that the proportion of the diameter of a crystal ofhigh quality capable of being grown is usually about half relative tothe diameter of the crucible. Accordingly, when a simple comparison ismade with respect to the size of the crucible required for growing acrystal of the same size, the amount of a noble metal which isexpensive, will be large in the case where a double crucible is used ascompared with the case where only single crucible is used. Further,deformation of the noble metal crucible is significant after growing thecrystal, according to the heating method or the shape of the doublecrucible, whereby the expensive noble metal crucible has to be repairedafter every use of from several times to several tens times.Accordingly, if a double crucible having a larger size is used, thenoble metal is far expensive as compared with the material, whereby thesingle crystal will be rather costly.

Further, there are several problems with respect to the methods ofsupplying the material in the method for producing a single crystal byusing a double crucible, which have been conventionally reported. In thecase where the material is supplied in the form of pellets as shown inFIG. 4, the weight of the pellets is heavy as compared with the weightof the powder. Accordingly, the supply of the material through thesupply tube, i.e. falling of the material, is carried out relativelysmoothly, and the material will not clog up the supply tube. However,the pellets will be supplied intermittently as compared with thecontinuous supply of the powder material, whereby the change in thetemperature along with the material supply tends to be significant.

On the contrary, when the powder material is supplied by the methodshown in FIG. 6 or 7, although there will be few problems in theintermittent temperature change along with the material supply, thematerial is likely to deposit on the supply tube during the supply,whereby the material tends to clog up the supply tube, depending on thesize or the calcination condition of the powder. The supply tube isarranged in the growing furnace and is not transparent, it is therebydifficult to observe if the material clogs up the tube during thegrowing, and the clogging may not be noticed until the growing hascompleted.

Further, the crystal which is more difficult to grow from a melt bypulling, usually requires a lower growth rate and a smaller crystaldiameter. In such a case where the amount of the crystal growth is smallper unit time, it is necessary to supply a powder material having acorrespondingly small particle size in a small amount. However, in sucha case, the powder material may not fall into the crucible, but be flownup. Further, as shown in FIGS. 4, 5 and 6, in a case where the crucibleis not rotated, if the material is always supplied to a certain specificportion between the outer crucible and the inner crucible, the crystalmay precipitates from said portion, or the grown crystal may havenon-uniformity in quality since no adequate melting and homogenizationof the material may be carried out.

The method for producing a single crystal by using a double crucible,which has conventionally been used for growing an oxide single crystal,has some advantages to overcome the problems of the conventionalCzochralski method, in principle. However, a means of supplying amaterial in an amount corresponding to the weight of the grown crystal,is not provided, or even if said means is provided, a method forindustrially producing an oxide single crystal of high quality stably ata low cost, has not been achieved.

The present inventors have conducted extensive studies to achieve theabove objects, and as a result, they have found the following. Namely,in the process for producing an oxide single crystal by rotation pullingby means of a double crucible made of a noble metal, by preciselycontrolling the method of arranging the material supply tube and themethod of supplying the material, the method of preparing the materialpowder, the shape of the double crucible and the relation between theinner crucible and the outer crucible, rotation of the crucible and thelike, it becomes possible to grow a crystal of high quality having alarge diameter and being longitudinal, stably at a low cost, withrespect to a crystal of the congruent melting composition or anothernonstoichiometric composition, which has been considered to be difficultto grow, and the present invention has been accomplished on the basis ofthese discoveries.

Namely, the present invention provides a process for producing an oxidesingle crystal by rotation pulling by means of a double crucible made ofa noble metal, consisting of an outer crucible made of a noble metal,and a cylindrical inner crucible for intersecting the surface of a meltin the outer crucible and connecting the melt at the bottom of the melt,which process comprises pulling a single crystal from the inner cruciblewhile directly measuring the weight of the growing crystal for growing,simultaneously supplying a gas into a closed container, supplying apowder material preserved in the closed container between the outercrucible and the inner crucible through a supply tube in the same amountby weight as the crystal growth, and growing the crystal while rotatingthe double crucible.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating the apparatus for producingan oxide single crystal of the present invention.

FIG. 2 is a diagram illustrating the phase diagram of Li and Nb.

FIG. 3 is a schematic diagram illustrating the state of a LN singlecrystal when a single crucible is used.

FIG. 4 is a schematic diagram illustrating an apparatus for producing asingle crystal employing a double crucible with supply of materialpellets, which is used in a conventional method.

FIG. 5 is a schematic diagram illustrating an apparatus for growing asingle crystal having a double crucible structure, which is used in aconventional method.

FIG. 6 is a schematic diagram illustrating an apparatus for growing asingle crystal by a double crucible equipped with a means ofautomatically supplying material powder, which is used in a conventionalmethod.

FIG. 7 is a schematic diagram illustrating an apparatus for growing asingle crystal by a double crucible equipped with a means ofautomatically supplying material powder, and a crucible rotationmechanism at a low rate in the direction opposite to the rotationdirection of the single crystal, which is used in a conventional method.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The effect of Mg addition to d₃₃ can be explained as follows. Thenonlinear optical characteristic of the LN or LT crystal may begenerated by the bonding of the Li element and the O element, andaccordingly, non-linearity will decrease along with the increase of theLi defect, and the LN or LT crystal having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of 0.500 shows maximumnon-linearity since the crystal contains no Li defect. In the case of acrystal which is not of the stoichiometric composition, excessive Nb orTa element will come into the Li defect portion, however, the bonding ofthe Nb or Ta element with the O element generates little non-linearity,whereby the non-linearity will be small as a whole. On the contrary, inthe case where Mg is added, Mg will come into the Li defect portion,thus generating non-linearity by bonding of the Mg element with the Oelement. The non-linearity by bonding of the Mg element and the Oelement is about the same as the non-linearity by bonding of the Lielement and the O element, and further, even if the molar fraction ofthe crystal of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) changes due to achange in the composition ratio of the melt for growing, the Mg elementpresent in the melt compensate the Li defect. Accordingly, the maximumnonlinear optical characteristics may be kept even if there is somedeviation in the molar fraction of the crystal of Li₂O/ (Nb₂O₅+Li₂O) orLi₂O/ (Ta₂O₅+Li₂O)

Further, the effect of Mg addition to the polarization inversion voltagecan be explained as follows. The significant decrease of thepolarization inversion voltage of the crystal of the stoichiometriccomposition as compared with the conventional LN or LT single crystal ofthe congruent melting composition, can be explainable by that the numberof the Li defects for pinning the polarization inversion becomes small.On the other hand, it is considered that in the case of Mg addition, theminimum voltage is obtained despite of the deviation of the molarfraction of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) within a range of atleast 0.490 and less than 0.500, since the pinning effect in a statewhere the Li site is substituted by Mg, is small as compared with theeffect by the Li defects. However, the pinning effect in the state wherethe Li site is substituted by Mg, is high as compared with the effect atthe portion having no defect, and accordingly, such an effect will besignificantly obtained only in a small range of the crystal having amolar fraction of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of at least0.490 and less than 0.500. For example, in the case where Mg is added tothe LN crystal of the congruent melting composition, although thepolarization inversion voltage will decrease, the electric resistancewill decrease by at least about four orders of magnitude as comparedwith the case where no Mg is added, and accordingly the polarizationinversion may not be carried out by a conventional voltage applyingmethod, and a special method of corona discharge method is required.When the molar fraction of Li₂O/(Nb₂O₅+Li₂O) is within a range of atleast 0.490 and less than 0.500, the amount of Mg, Zn, Sc and Inrequired is so small as from 0.1 to 3.0 mol % based on the total amountof said element, Nb and Li, whereby there will be no sudden drop inelectrical resistance. Likewise, in a case where Mg is added to the LTcrystal of the congruent melting composition, although the polarizationinversion voltage will decrease, the electric resistance will decreaseas compared with the case where no Mg is added. However, when the molarfraction of Li₂O/(Ta₂O₅+Li₂O) is within a range of at least 0.490 andless than 0.500, the amount of Mg, Zn, Sc and In required is so small asfrom 0.1 to 3.0 mol % based on the total amount of said element, Ta andLi, whereby there will be no sudden drop in electrical resistance.

Further, the effect of Mg addition to r₃₃ is considered to besubstantially the same as the effect to d₃₃, although it is notexplained at present. Namely, if the bonding of the Li element and the Oelement in the LN or LT crystal is the main factor for developing theelectrooptical characteristics, the electrooptical constant willdecrease along with the increase of the Li defects, and the LN or LTcrystal having a molar fraction of Li₂O/(Nb₂O₅+Li₂O) orLi₂O/(Ta₂O₅+Li₂O) of 0.500, having no Li defect contained, is expectedto show the maximum electrooptical constant. In the case of a crystalwhich is not of the stoichiometric composition, excessive Nb or Taelement comes into the Li defect portion, however, the bonding of the Nbor Ta element and the O element develops few electroopticalcharacteristics, and accordingly, the electrooptical constant tends tobe small as a whole. On the contrary, in the case of Mg addition, Mgcomes into the Li defect portion, thus developing the electroopticalcharacteristic by bonding of the Mg element and the O element. It isexplained that if the electrooptical characteristic by bonding of the Mgelement and the O element is about the same as the electroopticalcharacteristic by bonding of the Li element and the O element, the Mgelement present in the melt compensates the Li defect, even if the molarfraction of the crystal of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O)further changes due to the change of the composition ratio of the meltfor growing, and accordingly, the maximum electrooptical constant may bekept even if there is some deviation in the molar fraction of thecrystal of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O).

In the present invention, in the continuous supply method, for example,a single crystal having the same nonlinear optical constant, voltage forforming the polarization structure and electrooptical constant as thoseof the LN or LT single crystal having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of 0.500, can be grown, by addingat least one of Mg, Zn, Sc and In, in an amount of at least 0.1 mol,even if the setting of the composition ratio of the melt at theinitiation of the growing departs from the desired composition of themelt, and as a result, the yield of the crystal growth can besignificantly improved.

Further, there will be heterogeneity in the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) in the crystal, due to change inthe composition ratio of the melt generated during the growing resultingfrom evaporation of the melt or the heterogeneity in the compositionratio of the melt for growing, or due to the change in the temperatureof the melt at the interface between the crystal and the melt resultingfrom the temperature distribution in the crucible. However, according tothe present invention, the nonlinear optical constant, the voltage forforming the polarization structure and the electrooptical constant areno longer depend on the molar fraction of Li₂O/(Nb₂O₅+Li₂O) orLi₂O/(Ta₂O₅+Li₂O), whereby there will be no heterogeneity in suchcharacteristics, and accordingly, the growth condition for stablyproducing the LN or LT crystal having a high homogeneity and excellentperformances will be extremely moderate.

Here, the molar fraction of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) isadjusted to be at least 0.490 and less than 0.500, since the decrease ofthe polarization inversion voltage may be inadequate in the crystal of acomposition having the molar fraction of less than 0.490. Further, inthe crystal of a composition having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of at least 0.490 and less than0.500, little internal electric field will be observed, the hysteresiscurve (P-E curve) of the ferroelectric will have excellent symmetry, andthe rising of the P-E curve will be good near the anti-electric field,whereby the inversion of the spontaneous polarization can be extremelyeasily controlled when the electric field in the direction opposite tothe spontaneous polarization is applied from the outside. Further, withrespect to the crystal of a composition having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) of at least 0.490 and less than0.500, the concentration of added Mg is required to be less than 3 mol%, whereby sudden drop of the electric resistance can prevented whichmay be observed in the crystal having Mg added in an amount of 5.0 mol %to the crystal of the congruent melting composition, and further, a QPMelement having an extremely high efficiency with a polarizationinversion width range of substantially 1:1, can be produced.

With respect to an optical element for changing the wavelength of laserlight incoming into the single crystal by the above constitution, a LNsingle crystal having a nonlinear optical constant d₃₃ of at least 26pm/V and an applied voltage required for polarization inversion at roomtemperature of less than 3.7 kV/mm, and a LT single crystal having anonlinear optical constant d₃₃ of at least 15 pm/V and an appliedvoltage required for polarization inversion at room temperature of lessthan 3.5 kV/mm, can be produced. A QPM element having a thickness inz-axis direction of at least 1.0 mm and a period of the polarizationinversion of at most 30 μm is realized by the LN or LT crystal of thepresent invention for the first time, and a QPM element having a periodof the polarization inversion of at most 5 μm is also realized by thepresent invention for the first time.

Further, with respect to an optical element for controlling the laserlight incoming into the single crystal by utilizing the electroopticaleffect of the single crystal by the above constitution, a single crystalof lithium niobate having an electrooptical constant r₃₃ of at least 36pm/V at a wavelength of 0.633 μm, and a single crystal of lithiumtantalate having an electrooptical constant r₃₃ of at least 34 pm/V at awavelength of 0.633 μm, can be produced. An optical element for stablycarry out polarization, focusing and switching of light with a highefficiency, by utilizing a significant change in refractive index ofsuch a structure that the ferroelectric polarization of the singlecrystal is inversed, can be realized by the LN or LT crystal of thepresent invention for the first time.

With respect to the process for producing an oxide single crystal of thepresent invention, the powder material is supplied from a closedcontainer for preserving material into the double crucible through asupply tube made of ceramic or a noble metal and arranged in such amanner that the angle to the vertical is larger than 76°, a gas isflowed from the closed container through the supply tube at a rate offrom 50 to 500 cc/min, to smoothly supply the material without clogging,by using a powder material which has crystallization calcinationtreatment at a high temperature preliminarily applied thereto to obtaincoarse particles, and which is classified into a size within a range offrom 50 to 500 μm. The smooth supply of the material is likely to beinfluenced by a subtle adjustment angle of the material supply tube, andaccordingly, if the angle to the vertical is smaller than 76°, thematerial can not be smoothly supplied even if a gas is supplied to theclosed container as in the present invention.

The double crucible is arranged so that the height of the inner crucibleis equal to or higher than the height of the outer crucible, and themelt is deposited and solidified on the wall of the inner crucibleduring a step of cooling the melt after the pulling of the crystal hasbeen completed, whereby deformation of the outer crucible made of anoble metal can be minimized.

The double crucible is rotated at a rate of from 1 to 20 rpm so as toforcibly control the shape of the crystal growth interfacesimultaneously with the homogenization of the melt and the powdermaterial supplied.

The production process of the present invention is particularly suitablefor producing an oxide single crystal of LiTaO₃ or LiNbO₃ having adiameter of at least 2 inches.

The present invention further provides an apparatus for producing anoxide single crystal by rotation pulling by means of a noble metalcrucible with a continuous supply of a powder material, which comprisesan outer crucible made of an noble metal and a cylindrical innercrucible made of a noble metal for intersecting the surface of the meltin the outer crucible and connecting the melt at the bottom of the melt,wherein the outer crucible has such a shape that the ratio of the heightto the diameter is within a range of from 0.3 to 1, and the shapes ofthe inner crucible and the outer crucible are such that the ratio of thediameter of the inner crucible to the diameter of the outer crucible isfrom 0.55 to 0.9.

The present invention further provides the above apparatus for producingan oxide single crystal, which is provided with a weight measuringsensor attached to the closed container, and a powder material supplysystem having a means for supplying a gas to the closed container.

Further, the apparatus for producing an oxide single crystal of thepresent invention is preferably provided with a high frequency heatingdevice as a means of heating the material.

According to the present invention, growing of a crystal of high qualityhaving a large diameter and being longitudinal at a low cost, which hasconventionally been an object, can be achieved by significantlyimproving the condition or the shape of the material to be supplied, themethod for smoothly supplying the material, and the shape and therotation method of the crucible, which have been conventionallyproblematic, and by homogenizing the melt and the material supplied andoptimizing the growth interface.

The principle of the double crucible method for growing a LN crystal ofthe stoichiometric composition will be briefly explained with referenceto FIG. 2 illustrating the phase diagram of LN. As shown in the phasediagram, the congruent melting composition of the LN single crystal issuch that the molar fraction of Li₂O/(Nb₂O₅+Li₂O) is 0.485, andaccordingly, the LN single crystal obtained by conventional pullingmethod from a melt of the congruent melting composition will have anexcessive Nb component. However, when a crystal is grown from a melt ofa composition having a significantly excessive Li component (e.g. molarfraction of Li₂O/(Nb₂O₅+Li₂O) of from 0.56 to 0.60), a single crystal ofa composition in the vicinity of the stoichiometric composition (molarfraction of Li₂O/(Nb₂O₅+Li₂O) of 0.50), i.e. a single crystal having anonstoichiometric defect concentration of as low as possible, can beobtained.

However, if the composition of the growing crystal and the compositionof the melt are different, the compositions will be more different fromeach other along with the growth by the conventional pulling method,whereby it will be difficult to grow. Accordingly, to precisely controlthe density and the structure of the nonstoichiometric defects, theapparatus for growing a single crystal by the double crucible method ofthe present invention, as shown in FIG. 1, will be necessary.

In the process for producing a single crystal by rotation pulling of thepresent invention, a double crucible made of a noble metal is employed,the single crystal is pulled up from the crucible while directlymeasuring the weight of the growing crystal by a balance or a load cell,a gas is supplied to a closed container equipped with a weight measuringsensor provided at the upper part of a growing furnace, and a powdermaterial preserved in the closed container is continuously supplied inthe same amount as the crystal growth between the outer crucible and theinner crucible from the supply tube. A container having the powdermaterial put therein and a screw apparatus for discharging the powdermaterial, are provided on the weight measuring sensor provided in theclosed container, such as a balance, so as to measure the amount ofdecrease of the powder material, so that the powder material can besupplied in the same amount as the crystal growth by the material supplysystem controlled by a computer.

The powder material is discharged from the closed container forpreserving material, provided on the upper part of the furnace, by screwmethod, through the supply tube made of ceramics or a noble metalarranged in such a manner that the angle to the vertical is larger than76°. By flowing a gas to the closed container at a rate of from 50 to500 cc/min, the gas is flowed through the supply tube, whereby acontinuous and smooth supply of the material without clogging of thesupply tube with the powder material, which has conventionally been anobject to overcome, can be carried out for the first time. The closedcontainer is not necessarily completely closed so long as the leakage isnot significant. Further, as the gas, preferred is a gas of the sameatmosphere as the growing atmosphere, and a pure nitrogen gas ispreferred as an inert gas in the case of an iridium crucible, and amixed gas of oxygen and nitrogen is preferred in the case of a platinumcrucible.

The material powder is preliminarily subjected to crystallizationcalcination treatment at a high temperature to form coarse particles,and classified into a size within a range of from 50 to 500 μm, wherebya smoother and well-controlled supply of the material can be carriedout.

Further, it is essential to use a crucible having a larger diameter thanthe diameter of the crystal in order to grow a crystal having apredetermined diameter. Conventionally used is an outer crucible made ofa noble metal having such a shape that the height and the diameter aresubstantially the same. However, in the present invention, a crystal ofhigh quality can be grown even when the shape of the noble metal outercrucible is such that the ratio of the height to the diameter is smallerthan 1 and larger than 0.3. This double crucible has such a structurethat the melt filled in the crucible and melted is intercepted at thesurface of the melt by an inner crucible provided in the outer crucible,the melt in the outer crucible will not flow into the inner crucible atthe upper part, and the melts in the inner crucible and the outercrucible are connected with each other by large holes provided on thelower part of the wall of the inner crucible.

Further, the shapes of the inner crucible and the outer crucible are notrequired to have such a ratio in diameter of the inner crucible to theouter crucible of 0.5, on the contrary, by adjusting the ratio indiameter of the inner crucible to the outer crucible to be within arange of from 0.55 to 0.9, an oxide single crystal having a largediameter and a longitudinal shape can be produced at a low cost withminimized amount of an expensive noble metal. Here, with respect to theshape of the outer crucible made of a noble metal, the ratio of theheight to the diameter is preferably from 0.5 to 0.7 in view ofhomogenization of the melt and stabilization of the growing. Further,the ratio in diameter of the inner crucible to the outer crucible is notnecessarily constant, but it is preferably adjusted to be within a rangeof from 0.55 to 0.9 according to the diameter of the crystal to begrown, and it is preferably adjusted to be close to 0.9, along with theincrease in the diameter of the crystal to be grown. This is because thespace between the outer crucible and the inner crucible, required forthe material supply, may not be too large so long as the material supplytube can be stably arranged and the material will smoothly fall thereto.Accordingly, by adjusting the ratio in diameter of the inner crucible tothe outer crucible to be in the vicinity of 0.9, along with the increasein the diameter of the crystal to be grown, a crystal having a largediameter can be grown even with an outer crucible having a small outerdiameter.

Further, with respect to a conventional double crucible shown in FIGS. 4and 5, a noble metal crucible has such an arrangement that the height ofthe inner crucible is lower than the height of the outer crucible.However, in such a case, the lower part of the supply tube close to thecrucible is locally overheated by the crucible as a heating area,whereby the supplied material powder may deposit on the supply tube andcause clogging, or by solidification of the melt during a step ofcooling the crystal after the crystal growth, particularly the outercrucible is susceptible to stress and is likely to significantly deform,and accordingly, the crucible is hardly used for growing for severaltens times.

On the other hand, in the present invention, the double crucible isarranged in such a manner that the height of the inner crucible is equalto or higher than the height of the outer crucible, whereby the hatingtemperature of the upper part of the inner crucible by high frequencyintroduction heating is lower than the outer crucible, so that the meltis deposited and solidified on the wall of the inner crucible during astep of cooling the melt after the pulling has been completed, so as tominimize the deformation of the outer crucible made of a noble metal.Accordingly, a production of an oxide single crystal by using anexpensive noble metal can be carried out at a significantly low cost.

Further, the convection of the melt is forcibly controlled so that theshape of the crystal growth interface is flat or convex to the surfaceof the melt, simultaneously with homogenization of the melt and thepowder material supplied, by rotating the noble metal double crucible,whereby the crystal of high quality having a large diameter and alongitudinal shape and having fewer defects than the crystal grown bythe method for producing an oxide single crystal by the conventionaldouble crucible method, can be produced at a low cost.

Namely, although it has been known that it is important to make thecrystal growth interface to be flat or convex to the melt in order togrow a crystal of high quality having few defects, the growth interfacetends to be concave in the case where the temperature gradient of themelt in the inner crucible in the diameter direction is extremely gentlewhen the double crucible structure is employed. However, the growthinterface can be forcibly controlled to be convex by rotating thecrucible.

The growth interface is closely related with the relation between thesize of the crystal to be grown and the size of the inner crucible, thethermal conductivity of the crystal, and the presence or absence of adopant, and accordingly it is required to optimize the rotation of thecrucible, depending upon the material and the growth conditions. Here,the crucible is rotated with a purpose of homogenizing the melt and thepowder material supplied, and besides, positively controlling the growthinterface to be flat or convex, and from the viewpoint of this purpose,the crucible may be rotated in the same direction as the rotation of thecrystal, or in the opposite direction, to obtain the effect.

If the crucible is rotated only with a purpose of homogenization, thecrucible may be extremely slowly rotated in the direction opposite tothe rotation of the crystal at a low rate of from about 0.1 to about 0.3rpm, as conventionally known. In a case where the crystal and thecrucible are rotated in the same direction at the same rate, there willbe substantially no relative rotation, and the relative rotation seemsto be the same as the case where either the crucible nor the crystal arerotated. However, it is confirmed that the effect of controlling theconvection of the melt is obtained only when the crucible is rotated.

Here, in the case of growing the LN single crystal or the LT singlecrystal, the crucible may be rotated in either direction, and it may berotated at a high rate of at least 10 rpm, and in this case, it isimportant to adjust the center axes of the crystal, the crucible and therotation axis to be the same with a high accuracy. The rotation speed ofthe crucible is usually preferably from 1 to 20 rpm. Further, althoughthe effect of inducing the convection may be obtained even if therotation of the crucible is periodically inverted, it is preferred torotate the crucible in the predetermined direction with a purpose ofcontrolling the growth interface to be stable.

Now, the present invention will be described in detail with reference toExamples. However, it should be understood that the present invention isby no means restricted to such specific Examples.

In the present Examples, Mg was used as the above third element.

EXAMPLE 1

Commercially available high purity material powders of Li₂O and Nb₂O₅,where mixed to prepare a material having an excessive Li component andhaving a ratio of Li₂O:Nb₂O₅ of 0.56-0.60:0.44-0.40, and a material ofthe stoichiometric composition of Li₂O:Nb₂O₅ of 0.50:0.5. The mixtureswere subjected to rubber pressing under a hydrostatic pressure of 1ton/cm, and calcination in the atmosphere of about 1,050° C. to preparematerial sticks. Further, the mixed material of the stoichiometriccomposition to be a material for continuous supply, was calcinated inthe atmosphere of about 1,150° C, pulverized and classified into a sizewithin a range of from 50 to 500 μm. Then, to grow a single crystal bydouble crucible method, the material stick of the material having anexcessive Li component was preliminarily filled in an inner crucible andan outer crucible, and the crucible was heated to prepare a melt havingan excessive Li component. In experiments to confirm the effect of Mgaddition, commercially available high purity MgCO₃ or MgO waspreliminarily filled in the inner crucible and the outer crucible whenthe above material stick was filled. With respect to the weight of MgCO₃or MgO to be filled, five experiments were carried out wherein the Mgconcentration in the melt was 0.1, 0.2, 0.5, 1.0 or 3.0 mol % (mol % isdefined by [Mg]/([Mg]+[Li]+[Nb])×100 mol %). Further, experiments werecarried out wherein the Mg concentration was 0, 0.05 or 5.0 mol %, forcomparison.

Here, the principle of the double crucible method for growing the LNcrystal of the stoichiometric composition will be explained withreference to FIGS. 1 and 2. FIG. 2 illustrates the phase diagram of LN.As shown in the phase diagram, the LN single crystal obtained byconventional pulling method from a melt of the congruent meltingcomposition of the LN single crystal will have excessive Nb component,however, when a crystal is grown from a melt of a composition having asignificantly excessive Li component (e.g. the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of from 0.56 to 0.60), a single crystal of acomposition in the vicinity of the stoichiometric composition with amolar fraction of Li₂O/(Nb₂O₅+Li₂O) of 0.500, i.e. a single crystalhaving the nonstoichiometric defect concentration of as low as possible,can be obtained.

FIG. 1 illustrates an apparatus for producing an oxide single crystalused in the present invention. The double crucible had such a structurethat in an outer crucible 35, a cylinder 36 (hereinafter referred to asinner crucible) having a height higher by 7.5 mm than the outer cruciblewas arranged, and at the bottom of the inner crucible, three large holeshaving an approximate quadrangular shape and a size of about 20 mm×about30 mm, for connecting the outer crucible with the inner crucible, wereprovided. The crucible for the growing was made of platinum, and itssurrounding was covered with a growing furnace 47 to prevent influx ofthe exterior atmosphere. The shape of the double crucible was such thatthe ratio of the height to the diameter of the outer crucible 35 was0.45, and the ratio in diameter of the inner crucible to the outercrucible was 0.8. The outer crucible 35 had a diameter of 150 mm and aheight of 67.5 mm, and the inner crucible 36 had a diameter of 120 mmand a height of 75 mm. Between the inner crucible 36 and the outercrucible 35, there was a space 34 of about 15 mm, and a material supplytube 37 was stably arranged so that a material 45 would smoothly fall tosaid space. The surface of the melt was observed by a video camera (notshown). Substantially no convection at the surface of the melt wasobserved if the crucible was not rotated, and it was observed that theforcible convection of the melt in the rotation direction becamesignificant along with the gradual increase of the rotation speed of thecrucible, and the effect of the rotation of the crucible was observed.

A crystal was grown from a melt 41 having an excessive Li component inthe inner crucible. The temperature of the melt was stabilized to have apredetermined temperature by the making electric current to a highfrequency oscillator 48 and by a high frequency induction coil 43, thena LN single crystal cut in Z-axis direction, having a size of 5 mm×5mm×length 70 mm and in a monopolarization state, as a seed crystal 40,was attached to the lower part of a rotation support stick 38 andcontacted with the melt 41, and the crystal was rotated and pulledupward while controlling the temperature of the melt to grow a LN singlecrystal 42. The growing atmosphere was in the air. The rotation speed ofthe LN single crystal 42 was constant within a range of from 5 to 20rpm, and the pulling rate was changed within a range of from 0.5 to 3.0mm/h. An automatic diameter control was carried out to the diameter ofthe crystal so as to prepare a wafer having a diameter of 2 inches fromthe grown crystal. The growth weight of the growing crystal was measuredby a load cell 52, and a material 45 of the stoichiometric compositionhaving a molar fraction of Li₂O/(Nb₂O₅+Li₂O) of 0.500, in an amountcorresponding to the crystal growth, was supplied to the outer crucible35. Here, the change of the growth amount of the LN single crystal 42was obtained by a computer 49, and the supply of the material 45 wasinitiated when the growing of the single crystal 42 from the LN seedcrystal 40 was initiated and the 15 diameter control was stabilized. Thesupply of the material 45 was carried out in such a manner that thematerial 45 preliminarily preserved in a closed container 46 equippedwith a weight measuring sensor and arranged on the growing furnace 47,was supplied through the supply tube 37 made of ceramics or a noblemetal. A gas 51 was flowed to the supply tube 37 and the closedcontainer 46 at a rate of from 50 to 500 cc/min through a gas tube 33equipped with a valve. The flow rate of the gas 51 was optimized by theparticle size and the amount per unit time of the material 45 to besupplied. By the gas flow, a smooth supply of the material was carriedout without scattering or clogging of the supply tube 37. During thegrowing, the noble metal double crucible was rotated to forcibly controlthe convection of the melt so that the crystal growth interface was flator convex to the liquid surface, simultaneously with homogenization ofthe melt and the powder material supplied. With respect to eachcomposition, by growing of about 1.5 weeks, a colorless and transparentLN crystal having a diameter of 60 mm and a length of 110 mm and havingno crack was obtained.

With respect to each crystal obtained, the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) was obtained by chemical analysis. For thedetermination of the measurement positions in each sample, measurementposition a was a position on the center axis of the crystal distanced by15 mm from the seed crystal, and three additional measurement positionsb, c and d were taken along the center axis at positions distanced byevery 10 mm from the position a in the direction away from the seedcrystal. Each measurement sample was cut into 7 mm cubes centering themeasurement position. The results for measuring the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) are shown in Table 1. It is difficult to obtain theabsolute value of the composition ratio with a high accuracy by chemicalanalysis, and in the case of the LN crystal, there would be an error ofa level of from 0.001 to 0.005 in the molar fraction of Li₂O/(Nb₂O₅+Li₂O). Accordingly, with respect to the LN crystal of acomposition in the vicinity of the stoichiometric composition, thecomposition was extremely carefully analyzed. The results in Table 1 areaverage values obtained by evaluation by means of several analyzers withrespect to several positions in the same sample. As a result, in thecase of the LN single crystal, the molar fraction of Li₂O/(Nb₂O₅+Li₂O)did not exceed 0.005 in the crystal having e.g. Mg added thereto, evenif the crystal had a composition in the vicinity of the stoichiometriccomposition. Further, measurements of these samples were carried outalso with respect to the Mg content, and it was confirmed that the Mgcontent in the crystal was substantially the same as the concentrationof Mg added to the melt.

TABLE 1 Molar fraction of Li₂O/(Nb₂O₅ + Li₂O) Not 0.05 0.10 0.20 0.501.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a 0.4920.494 0.496 0.498 0.496 0.494 0.492 0.489 b 0.493 0.493 0.495 0.4990.498 0.495 0.492 0.490 c 0.494 0.494 0.496 0.498 0.497 0.495 0.4910.491 d 0.494 0.496 0.494 0.497 0.495 0.495 0.492 0.490

Then, the nonlinear optical constant was measured with respect to thesesamples. The absolute value of the nonlinear optical constant wasaccurately determined by carrying out absolute measuring by using wedgemethod, and by carrying out analysis considering the effect of themultiple reflection to the measured data. As a result, it was found thatmost of the conventional values with respect to a substance having ahigh refractive index (n>2) such as the LN single crystal, wereoverestimated, and by measuring d₃₃ of the LN crystal of the congruentmelting composition, a value of 25.1 pm/V which corresponds to theresult obtained in the literature, was obtained. The laser light usedfor the measurement had a wavelength of single longitudinal modecontinuous oscillation of 1.064 μm. The results of the measurement areshown in Table 2. In the case where Mg was added in an amount of atleast 0.1 mol %, values were all at least 30.0 pm/V, despite ofsignificant deviation of the molar fraction of the crystal ofLi₂O/(Nb₂O₅+Li₂O) within a range of from 0.489 to 0.499. On the otherhand, in the case where Mg was added in an amount of less than 0.1 mol%, the nonlinear optical constant tends to be slightly poor as comparedwith the case where the addition amount of Mg was at least 0.1 mol %. Byabsolute measuring method by using the wedge method, a diagonalcomponent such as d₃₃ can be measured, which can not be measured byconventional absolute measuring method by means of phase matching.Further, it is extremely difficult to carry out strict analysisconsidering the multiple reflection by rotation maker fringe method, andan accurate nonlinear optical constant can be obtained only by carryingout nonreflection coating to measure under such a condition that nomultiple reflection would take place. Accordingly, it can be stated thatthe absolute measuring by wedge method is an extremely effectivemeasuring means.

TABLE 2 Nonlinear optical constant d₃₃ (unit: pm/V) Not 0.05 0.10 0.200.50 1.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a27.9 29.5 30.1 30.2 30.1 30.1 30.3 30.3 b 28.8 29.5 30.0 30.3 30.0 30.430.2 30.1 c 29.0 29.6 30.0 30.2 30.1 30.3 30.2 30.0 d 29.1 29.6 30.230.1 30.3 30.1 30.1 30.1

Then, with respect to each single crystal obtained in the same manner asmentioned above, z-plate samples having a cross-section of 10 mm×10 mmand a thickness of 1.0 mm were cut from the measurement positions a tod.

Electrodes were formed on both z-axis surfaces, and voltage was appliedthereto, whereupon the voltage required for polarization inversion ofthe crystal was measured. The results are shown in Table 3. The voltagewas at most 3.7 kV/mm in all cases where Mg was added in an amount of atleast 0.1 mol %, and when Mg was added in an amount of at least 0.2 mol%, smaller values constant in the vicinity of 3.1 kV/mm were obtained.It is considered that in such crystals, the internal electric field washardly observed, the hysteresis curve (P-E curve) of the ferroelectrichad excellent symmetry, and the rising of the P-E curve was good nearthe anti-electric field, and accordingly there was a small deviationamong the measured values. On the other hand, in the crystals having Mgadded in an amount of less than 0.1 mol %, the polarization inversionvoltage tended to be slightly high as compared with the crystal havingMg added in an amount of at least 0.1 mol %. On the other hand, in thecase where Mg was added in an amount of at least 5 mol %, although thepolarization inversion tended to be small, deviation among the samplestended to be large. This is considered to be because the rising of theP-E curve of the ferroelectric was gentle and poor near theanti-electric field, whereby it became difficult to measure the absolutevalue of the polarization inversion voltage, and to be because of theelectrical resistance of the material. Further, the inversion voltage ofthe crystal of the congruent melting composition was measured under thesame measurement conditions with the same shape of the samples,whereupon measurement was difficult in some cases. Measurement could becarried out with thin samples having a thickness of a level of from 0.2to 0.5 mm, and an extremely high value of 21.0 kV/mm was obtained.

TABLE 3 Inversion voltage (unit: kV/mm) Not 0.05 0.10 0.20 0.50 1.003.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a 5.2 3.8 3.33.1 3.0 3.1 3.0 2.3 b 5.0 3.9 3.4 2.8 3.0 2.9 3.1 2.9 c 4.9 3.9 3.3 2.93.0 3.1 3.1 2.1 d 4.8 3.8 3.3 3.0 3.1 3.1 3.1 2.5

Then, from each single crystal obtained in the same manner as mentionedabove, samples of 5 mm×3 mm×2 mm in x, y and z azimuths respectively,were cut from the measurement positions a to d. Electrodes were formedon both z-axis surfaces, and the electrooptical constants of the sampleswere measured by using a Mach-Zehnder interferometer. The results areshown in Table 4. As shown in Table 4, it was clarified that some ofthese constants were extremely sensitive to the crystal composition.Namely, with respect to a LN single crystal having a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of at least 0.490 and less than 0.500, theelectrooptical constant r₁₃ would not increase as compared with theconventional LN single crystal of the congruent melting composition,however, r₃₃ would increase by at least about 20% to be about 36 pm/V,which is extremely high as compared with the value of about 31.5 pm/V ofthe LN single crystal of the congruent melting composition. Particularlywith respect to the electrooptical constant, such a tendency wasobserved that the closer to the stoichiometric composition, the higherthe constant. Further, with respect to the crystal having Mg addedthereto, the electrooptical constant further increased to be at least 38pm/V in the case where Mg was added in an amount of at least 0.1 mol %,and the maximum value of 39.5 pm/V was obtained in the crystal having Mgadded in an amount of about 1 mol %. On the other hand, theelectrooptical constant tended to gradually decrease along with theincrease of the addition amount of Mg exceeding 1 mol %.

TABLE 4 Electrooptical constant r₃₃ (unit: pm/V) Not 0.05 0.10 0.20 0.501.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a 36.036.7 38.1 38.5 38.8 39.2 38.4 36.9 b 36.2 37.0 38.0 38.4 38.6 39.5 38.637.1 c 37.1 37.8 38.1 38.4 38.8 39.3 38.3 36.5 d 37.8 37.6 38.1 38.339.0 39.2 38.2 36.4

EXAMPLE 2

Commercially available high purity material powders of Li₂O and Nb₂O₅were mixed to prepare a material having an excessive Li component with aratio of Li₂O:Nb₂O₅ of 0.56-0.60:0.44-0.40. The mixture was subjected torubber pressing under a hydrostatic pressure of 1 ton/cm², andcalcination in the atmosphere of about 1,050° C., to prepare a materialstick. Then, to grow a single crystal by single crucible method, i.e. byconventional CZ method, the prepared material stick of the materialhaving an excessive Li component, was preliminarily filled in acrucible, and the crucible was heated to prepare a melt having anexcessive Li component. In experiments to confirm the effect of Mgaddition, commercially available high purity MgCO₃ or MgO waspreliminarily filled in the crucible when the material stick was filled.With respect to the weight of MgCO₃ or MgO to be filled, fiveexperiments were carried out wherein the Mg concentration in the meltwas 0.1, 0.2, 0.5, 1.0 or 3.0 mol % (mol % is defined by[Mg]/([Mg]+[Li]+[Nb])×100 mol %). Further, experiments were carried outin the same manner except that MgCO₃ or MgO was not added, or the Mgconcentration was 0.05 or 0.5 mol %, for comparison. The crucible usedfor the growing was made of platinum, and had a cylindrical shape, adiameter of 150 mm and a height of 100 mm. The surface of the melt wasobserved by a video camera throughout the growing. A significant meltconvection was observed even when the crucible was not rotated, whichwas not seen in Example 1.

A crystal was grown from the surface of the melt at the center portionof the crucible. The temperature of the melt was stabilized to have apredetermined temperature, then a LN single crystal cut in Z-axisdirection, having a size of 5 mm×5 mm×length 70 mm, and in amonopolarization state, as a seed crystal 60, was contacted with themelt, and the crystal was rotated and pulled upward while controllingthe temperature of the melt, to grow a single crystal. The crucible wasnot rotated but fixed. The growing atmosphere was in the air. Therotation speed of the crystal was constant at 2 rpm, and the pullingrate was changed within a range of from 0.5 to 3.0 mm/h. The weight ofthe crystal growth was measured by a load cell throughout the growing soas to prepare a wafer having a diameter of 2 inches from the growncrystal, and an automatic diameter control was carried out immediatelyafter the seeding so that the diameter of the crystal was about 60 mm.For the growing in the present Example, no supply of the material duringthe growing, as in the case of using the double crucible in Example 1,was carried out. The schematic view illustrating the obtained LN singlecrystal is shown in FIG. 3. In both case where no Mg was added and thecase where Mg was added in each concentration, when pulling was carriedout with a diameter of 60 mm, a transparent single crystal portion 61was grown immediately after the initiation of the growing until thecrystal had grown to have a length of about 30 mm. Then, the eutecticpoint was attained, and the portion which was pulled after the eutecticpoint was attained, was not the LN single crystal but a ceramic layer62.

With respect to each crystal obtained, the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) was obtained from chemical analysis. For thedetermination of measurement positions, measurement position g was aposition on the center axis of the crystal distanced by 5 mm from theseed crystal 60, and two additional measurement positions h and i weretaken along the center axis at positions distanced by every 10 mm fromthe position g in the direction away from the seed crystal. Eachmeasurement sample was cut into 7 mm cubes centering the measurementpositions. The results of measuring the molar fraction ofLi₂O/(Nb₂O₅+Li₂O) are shown in Table 5. Further, the samples weremeasured with respect to the Mg content, and it was confirmed that theMg content in the crystal was substantially the same as theconcentration of Mg added to the melt.

TABLE 5 Molar fraction of Li₂O/(NbO₅ + Li₂O) Not 0.05 0.10 0.20 0.501.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g 0.4890.489 0.491 0.495 0.495 0.491 0.491 0.490 h 0.491 0.494 0.495 0.4980.496 0.492 0.492 0.494 i 0.498 0.496 0.497 0.499 0.498 0.494 0.4960.496

Then, the nonlinear optical constants of these samples were measured byusing wedge method. The results of the measurements are shown in Table6. As shown in Table 6, it is evident that in the case where the amountof Mg was less than 0.1 mol %, the nonlinear optical constant d₃₃gradually increased from the portion close to the seed crystal to theportion of eutectic point. This increase is considered to beattributable to the fact that the material was not supplied during thegrowing, whereby the composition ratio of the melt changed with time. Onthe other hand, in the case where the addition amount of Mg was at least0.1 mol %, such an increase shown in the case where the amount was lessthan 0.1 mol %, was not observed. The nonlinear optical constant d₃₃ wassubstantially constant among the measurement positions g to i withdistance of 10 mm, and when the amount was at least 0.2 mol %, theentire crystal substantially uniformly showed the maximum value of atleast 30 pm/V.

TABLE 6 Nonlinear optical constant d₃₃ (unit: pm/V) Not 0.05 0.10 0.200.50 1.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g25.9 27.0 29.5 30.0 30.1 29.9 30.1 29.5 h 27.5 28.2 30.1 30.2 30.0 30.230.0 29.9 i 29.6 29.5 30.0 30.1 30.1 30.1 30.1 30.1

Then, single crystals were produced in the same manner as mentionedabove, and z-plate samples having a cross-section of 10 mm×10 mm and athickness of 1.0 mm were cut from the measurement positions g to i.Electrodes were formed on both z-axis surfaces, and voltage was appliedthereto, whereupon the voltage required for the polarization inversionof the crystal was measured. The results of the measurements are shownin Table 7. From Table 7, it was found that the polarization inversionvoltage gradually decreased from the portion close to the seed crystaltoward the portion of the eutectic point, in the case where the additionamount of Mg was less than 0.1 mol %. This decrease is considered to beattributable to the fact that the material was not supplied during thegrowing, whereby the composition ratio of the melt changed with time. Onthe other hand, in the case where the addition amount of Mg was at least0.1 mol %, such a decrease as shown in the case where it was less than0.1 mol %, was not observed, the inversion voltage was at most 0.5 kV/mmamong the measurement positions g to i with a distance of 10 mm, andwhen the addition amount was at least 0.2 mol %, the entire crystalsubstantially uniformly showed the minimum value of 3.1 kV/mm.

TABLE 7 Inversion voltage (unit: kV/mm) Not 0.05 0.10 0.20 0.50 1.003.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g 7.0 5.0 3.63.1 3.1 3.1 3.1 2.9 h 5.2 3.8 3.3 3.1 3.1 3.1 3.1 3.0 i 3.1 3.1 3.1 3.13.1 3.1 3.1 2.6

EXAMPLE 3

Various optical functional elements were prepared by periodicalinverting polarization of the LN single crystals obtained in the samemanner as in Example 1. Here, preparation of a QPM element generatingblue or green light to the fundamental wave of near infrared lighthaving a wavelength of 840 nm or 1,064 nm, will be shown below. Waferswere cut from each of the crystals having Mg added in eachconcentration, obtained in Example 1. The wafers had a diameter of 2inches and a thickness of 0.3 mm, 0.5 mm, 1.0 mm, 2.0 mm or 3.0 mm.Polishing was applied to both sides, and the wafers were cut into z-axisazimuth, and a pectinate pattern was formed with an electrode of a Crfilm having a thickness of 500 nm on the +z surface by means oflithography. The periods of the electrode were 3.0 μm and 6.8 μm toobtain a primary QPM structure so as to generate a harmonic of blue andgreen light with a high efficiency. Then, an insulating film having athickness of 0.5 μm was overcoated on the +z surface, followed bypreservation treatment at a temperature of 350° C. for 8 hours. Then,the crystal was sandwiched between the electrodes by means of an aqueouslithium chloride electrolyte on both z-surfaces, and a high voltagepulse was applied thereto. The current through the LN single crystal wasmonitored with a resistance of 1 kΩ.

A polarization inversion grating was formed, and then the y-surfaces ofthe crystal to be side surfaces, were polished and etched by a mixedsolution of hydrofluoric acid and nitric acid, and the appearance of thepolarization inversion grating was observed. The pulse duration and theelectric current of the applied voltage were optimized by repeating thepolarization inversion and the observation with respect to each sample,to adjust the polarization inversion grating width ratio and the mode ofthe polarizations inversion to be ideal 1:1 (1:0.95-1) over all samples.

As a result of the experiments, a polarization inversion grating widthratio of substantially 1:1 was obtained with respect to most sampleshaving a thickness of 0.3 mm, 0.5 mm, 1.0 mm, 2.0 mm or 3.0 mm. However,the ratio of substantially 1:1 could not be obtained with respect to thecrystal having a Mg concentration of higher than 3 mol %. Specifically,such a tendency was observed that linearity of the polarizationinversion was poor, and the adjacent polarizations were connected witheach other in many portions. This is considered to be attributable tothe fact that since the Mg concentration was too high, the electricalresistance decreased and minute application of periodic voltage becamedifficult, whereby the crystal became heterogeneous, and portionscontaining a particularly large amount of Mg inhibited the linearity ofthe polarization inversion. Namely, it is preferred to adjust theconcentration of Mg to be at most 3 mol %, in the case of preparing anelement for polarization inversion.

EXAMPLE 4

Optical functional elements having a polarization inversion grating wereprepared in the same manner as in Example 3 except that the diameter was2 inches and the thickness was 1.0 mm. In order to obtain thepolarization inversion grating width of 5 μm, the polarization inversiongrating width ratio was adjusted to be close to ideal 1:1 (1:0.95-1). Asa result of experiments, the polarization inversion grating width ratioof substantially 1:1 (1:0.95-1) could be obtained with respect to mostsamples, however, it could not be obtained with respect to the crystalhaving a Mg concentration of higher than 3 mol %.

EXAMPLE 5

A polarization inversion structure of a lens or a prism was formed onthe LN single crystal prepared in Example 1, to prepare an opticalelement such as a cylindrical lens, a beam scanner or a switch or apolarization element utilizing the electrooptical effect. A LN singlecrystal having a diameter of 2 inches and a thickness of from 0.2 to 2.0mm, having both surfaces polished and z-cut, was prepared, and Alelectrodes of about 200 μm were formed by sputtering and a pattern of alens or a prism was formed by means of lithography on both z-surfaces.Then, a pulse voltage of about 3.5 KV/mm was applied to the +z-surfacefor polarization inversion. Further, heat treatment was applied at 500°C. for about 5 hours in the air, to eliminate non-uniformity of therefractive index introduced by the polarization inversion. Further,mirror polishing was applied to the edge surface of the crystal, toobtain the incoming and outgoing face for laser light. The performancesof the optical element utilizing the electrooptical effect of the LNsingle crystal forming inversion of the refractive index by thepolarization inversion structure made by way of trial, were determinedby the design for the polarization inversion structure of a lens or aprism, the accuracy of the preparation process for the polarizationinversion structure, or the degree of the electrooptical constant whichthe material had. Here, the polarization inversion structure of thepattern of a lens or a prism was characterized by that good elementcharacteristics were obtained since the polarization inversion wasextremely easily controlled. With respect to the conventional LN crystalof the congruent melting composition, a large applied voltage wasrequired for polarization inversion, whereby it has been difficult tocontrol the polarization inversion structure. Further, with respect tothe conventional LN crystal of the congruent melting composition or theLN single crystal having at least 5 mol % of MgO added thereto, theinversion of the spontaneous polarization was poorly controlled, wherebyit has been difficult to form a polarization inversion structure of alens or a prism with a high accuracy. Such problems were not observed inthe case where an optical element such as a cylindrical lens, a beamscanner or a switch or a polarization element utilizing theelectrooptical effect, was prepared by forming a polarization inversionstructure of a lens or a prism on the LN single crystal prepared inExample 1. Further, the crystal of Example 1 had an electroopticalconstant r₃₃ higher than that of the crystal of the congruent meltingcomposition, whereby more excellent device performance was obtained witha smaller operating voltage. For example, in the case of thepolarization element, a large polarization angle of about 6° wasobtained with a voltage of about 600 V/mm. Further, a lens operating inthe vicinity of about 100 V/mm and a switching operation at about 500V/mm were obtained.

In the above Examples, the voltage applying method has been described indetail as Examples illustrating the polarization inversion at atemperature lower than the curie point. However, according to thepresent invention, an optical element having a periodic polarizationinversion grating formed with a high accuracy will be realized by usinga LN single crystal of the stoichiometric composition excellent incontrolling and the level of performance of the crystal, even byemploying another method such as 1) Ti internal dispersion method, 2)SiO₂ loading heat treatment method, 3) proton exchange heat treatmentmethod, or 4) electron beam scanning irradiation method.

Further, detailed explanation has been made with respect to Exampleswherein the QPM element generating blue or green light to thefundamental wave of infrared light having a wavelength of 840 nm or1,064 nm was prepared. However, according to the present invention, thefundamental wave is not restricted to the two wavelengths, and thepresent invention may be applied to the longer wavelength region atwhich the LN single crystal is transparent and the phase matching can becarried out. Further, the optical functional element of the presentinvention for periodically inverting the polarization structure of thesingle crystal of lithium niobate, and changing the wavelength of theincoming laser having a wavelength at from visible to near infraredregion, to be shorter or larger, can be applied to not only a secondharmonic generating element but also an optical parametric oscillatingelement in various fields for e.g. remote sensing and gas detecting.

EXAMPLE 6

Commercially available high purity material powders of Li₂O and Ta₂O₅were mixed to prepare a material having an excessive Li component andhaving a ratio of Li₂O:Ta₂O₅ of 0.56-0.60:0.44-0.40, and a material ofthe stoichiometric composition of Li₂O:Ta₂O₅:0.50:0.50. The mixtureswere subjected to rubber pressing under a hydrostatic pressure of 1ton/cm², and calcination in the atmosphere of about 1,050° C. to preparematerial sticks. Further, the mixed material of the stoichiometriccomposition to be a material for continuous supply, was calcinated inthe atmosphere of about 1,150° C., pulverized and classified into a sizewithin a range of from 50 to 500 μm. Then, to grow a single crystal bydouble crucible method, the material stick of the material having anexcessive Li component was preliminarily filled in an inner crucible andan outer crucible, and the crucible was heated to prepare a melt havingan excessive Li component. In experiments to confirm the effect of Mgaddition, commercially available high purity MgO or MgCO₃ waspreliminarily filled in the inner crucible and the outer crucible whenthe above material stick was filled. With respect to the weight of MgOor MgCO₃ to be filled, five experiments were carried out wherein the Mgconcentration in the melt was 0.1, 0.2, 0.5, 1.0 or 3.0 mol %, (mol % isdefined by [Mg]/([Mg]+[Li]+[Ta])×100 mol %). Further, experiments werecarried out wherein the Mg concentration was 0, 0.05 or 5.0 mol %, forcomparison.

Here, the principle of the double crucible method for growing the LTcrystal of the stoichiometric composition will be explained. The LTsingle crystal obtained by conventional pulling method from a melt ofthe congruent melting composition of the LT single crystal will haveexcessive Ta component, however, when a crystal is grown from a melt ofa composition having a significantly excessive Li component (e.g. themolar fraction of Li₂O/(Ta₂O₅+Li₂O) of from 0.56 to 0.60), a singlecrystal of a composition in the vicinity of the stoichiometriccomposition with a molar fraction of Li₂O/(Ta₂O₅+Li₂O) of 0.500, i.e. asingle crystal having the nonstoichiometric defect concentration of aslow as possible, can be obtained.

FIG. 1 illustrates an apparatus for producing an oxide single crystalused in the present invention. The double crucible used in the presentExample had such a structure that in an outer crucible 35, a cylinder 36(hereinafter referred to as inner crucible) having a height higher by7.5 mm than the outer crucible was arranged, and at the bottom of theinner crucible, three large holes having an approximate quadrangularshape and a size of about 20 mm x about 30 mm, for connecting the outercrucible with the inner crucible, were provided. The crucible used forthe growing was made of iridium, and its surrounding was covered with agrowing furnace 47 to prevent influx of the exterior atmosphere. Theshape of the double crucible was such that the ratio of the height tothe diameter of the outer crucible 35 was 0.45, and the ratio indiameter of the inner crucible to the outer crucible was 0.8. The outercrucible 35 had a diameter of 150 mm and a height of 67.5 mm, and theinner crucible 36 had a diameter of 120 mm and a height of 75 mm.Between the inner crucible 36 and the outer crucible 35, there was aspace 34 of about 15 mm, and a material supply tube 37 was stablyarranged so that a material 45 would smoothly fall to said space. Thesurface of the melt was observed by a video camera (not shown).Substantially no convection at the surface of the melt was observed ifthe crucible was not rotated, and it was observed that the forcibleconvection of the melt in the rotation direction became significantalong with the gradual increase of the rotation speed of the crucible,and the effect of the rotation of the crucible was observed.

A crystal was grown from a melt 41 having an excessive Li component inthe inner crucible. The temperature of the melt was stabilized to have apredetermined temperature by the making electric current to a highfrequency oscillator 48 and by a high frequency induction coil 43, thena LT single crystal cut in Z-axis direction, having a size of 5 mm×5mm×length 70 mm and in a monopolarization state, as a seed crystal 40,was attached to the lower part of a rotation support stick 38 andcontacted with the melt 41, and the crystal was rotated and pulledupward while controlling the temperature of the melt to grow a LT singlecrystal 42. The growing atmosphere was nitrogen containing oxygen in anamount of 1%. The rotation speed of the LT single crystal 42 wasconstant within a range of from 5 to 20 rpm, and the pulling rate waschanged within a range of from 0.5 to 3.0 mm/h. An automatic diametercontrol was carried out to the diameter of the crystal so as to preparea wafer having a diameter of 2 inches from the grown crystal. The growthweight of the growing crystal was measured by a load cell 52, and amaterial 45 of the stoichiometric composition having a molar fraction ofLi₂O/(Ta₂O₅+Li₂O) of 0.500, in an amount corresponding to the crystalgrowth, was supplied to the outer crucible 35. Here, the change in thegrowth amount of the LT single crystal 42 was obtained by a computer 49,and the supply of the material 45 was initiated when the growing of thesingle crystal 42 from the LT seed crystal 40 was initiated and thediameter control was stabilized. The supply of the material 45 wascarried out in such a manner that the material 45 preliminarilypreserved in a closed container 46 equipped with a weight measuringsensor and arranged on the growing furnace 47, was supplied through thesupply tube 37 made of ceramics or a noble metal. A gas 51 was flowed tothe supply tube 37 and the closed container 46 at a rate of from 50 to500 cc/min through a gas tube 33 equipped with a valve. The flow rate ofthe gas 51 was optimized by the particle size and the amount per unittime of the material 45 to be supplied. By the gas flow, a smooth supplyof the material was carried out without scattering or clogging of thesupply tube 37. During the growing, the noble metal double crucible wasrotated to forcibly control the convection of the melt so that thecrystal growth interface was flat or convex to the liquid surface,simultaneously with homogenization of the melt and the powder materialsupplied. With respect to each composition, by growing of about 1.5weeks, a colorless and transparent LT crystal having a diameter of 60 mmand a length of 110 mm and having no crack was obtained.

With respect to each crystal obtained, the molar fraction ofLi₂O/(Ta₂O₅+Li₂O) was obtained by chemical analysis. For thedetermination of the measurement positions in each sample, measurementposition a was a position on the center axis of the crystal distanced by15 mm from the seed crystal, and three additional measurement positionsb, c and d were taken along the center axis at positions distanced byevery 10 mm from the position a in the direction away from the seedcrystal. Each measurement sample was cut into 7 mm cubes centering withthe measurement position. The results for measuring the molar fractionof Li₂O/(Ta₂O₅+Li₂O) are shown in Table 8. It is difficult to obtain theabsolute value of the composition ratio with a high accuracy by chemicalanalysis, and in the case of the LT crystal, there would be an error ofa level of from 0.001 to 0.005 in the molar fraction of Li₂O/(Ta₂O₅+Li₂O). Accordingly, with respect to the LT crystal of acomposition in the vicinity of the stoichiometric composition, thecomposition was extremely carefully analyzed. The results in Table 8 areaverage values obtained by evaluation by means of several analyzers withrespect to several positions in the same sample. As a result, in thecase of the LT single crystal, the molar fraction of Li₂O/(Ta₂O₅+Li₂O)did not exceed 0.005 in the crystal having e.g. Mg added thereto, evenif the crystal had a composition in the vicinity of the stoichiometriccomposition. Further, measurements of these samples were carried outalso with respect to the Mg content, and it was confirmed that the Mgcontent in the crystal was substantially the same as the concentrationof Mg added to the melt.

TABLE 8 Molar fraction of Li₂O/(Ta₂O₅ + Li₂O) Not 0.05 0.10 0.20 0.501.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a 0.4910.493 0.495 0.497 0.497 0.493 0.491 0.488 b 0.493 0.494 0.494 0.4980.498 0.494 0.491 0.491 c 0.492 0.494 0.496 0.496 0.498 0.495 0.4930.492 d 0.493 0.492 0.495 0.498 0.496 0.493 0.492 0.492

Then, the nonlinear optical constant was measured with respect to thesesamples. The absolute value of the nonlinear optical constant wasaccurately determined by carrying out absolute measuring by using wedgemethod, and by carrying out analysis considering the effect of themultiple reflection to the measured data. As a result, it was found thatmost of the conventional values with respect to a substance having ahigh refractive index (n>2) such as the LT single crystal, wereoverestimated, and by measuring d₃₃ of the LT crystal of the congruentmelting composition, a value of 13.8 pm/V which corresponds to theresult obtained in the literature, was obtained. The laser light usedfor the measurement had a wavelength of single longitudinal modecontinuous oscillation of 1.064 μm. The results of the measurement areshown in Table 9. In the case where Mg was added in an amount of atleast 0.1 mol %, values were all at least 16.0 pm/V, despite ofsignificant deviation of the molar fraction of the crystal ofLi₂O/(Ta₂O₅+Li₂O) within a range of from 0.489 to 0.499. On the otherhand, in the case where the addition amount of Mg was less than 0.1 mol%, the nonlinear optical constant tends to be slightly poor as comparedwith the case where the addition amount of Mg was at least 0.1 mol %. Byabsolute measuring method by using the wedge method, a diagonalcomponent such as d₃₃ can be measured, which can not be measured byconventional absolute measuring method by means of phase matching.Further, it is extremely difficult to carry out strict analysisconsidering the multiple reflection by rotation maker fringe method, andan accurate nonlinear optical constant can be obtained only by carryingout nonreflection coating to measure under such a condition that nomultiple reflection would take place. Accordingly, it can be stated thatthe absolute measuring by wedge method is an extremely effectivemeasuring means.

TABLE 9 Nonlinear optical constant d₃₃ (unit: pm/V) Not 0.05 0.10 0.200.50 1.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a14.9 15.5 16.1 16.2 16.1 16.1 16.3 16.3 b 14.8 15.5 16.0 16.3 16.0 16.416.2 16.1 c 14.0 15.6 16.0 16.2 16.1 16.3 16.2 16.0 d 14.1 15.6 16.216.1 16.3 16.1 16.1 16.1

Then, with respect to each single crystal obtained in the same manner asmentioned above, z-plate samples having a cross-section of 10 mm×10 mmand a thickness of 1.0 mm were cut from the measurement positions a tod. Electrodes were formed on both z-axis surfaces, and voltage wasapplied thereto, whereupon the voltage required for polarizationinversion of the crystal was measured. The results are shown in Table10. The voltage was at most 3.5 kV/mm in all cases where Mg was added inan amount of at least 0.1 mol %, and when Mg was added in an amount ofat least 0.2 mol %, smaller values constant in the vicinity of 2.0 kV/mmwere obtained. It is considered that in such crystals, the internalelectric field was hardly observed, the hysteresis curve (P-E curve) ofthe ferroelectric had excellent symmetry, and the rising of the P-Ecurve was good near the anti-electric field, and accordingly there was asmall deviation among the measured values. On the other hand, in thecrystals having Mg added in an amount of less than 0.1 mol %, thepolarization inversion voltage tended to be slightly high as comparedwith the crystal having Mg added in an amount of at least 0.1 mol %. Onthe other hand, in the case where Mg was added in an amount of at least5 mol %, although the polarization inversion tended to be small,deviation among the samples tended to be large. This is considered to bebecause the rising of the P-E curve of the ferroelectric was gentle andpoor near the anti-electric field, whereby it became difficult tomeasure the absolute value of the polarization inversion voltage, and tobe because of the electrical resistance of the material. Further, theinversion voltage of the crystal of the congruent melting compositionwas measured under the same measurement conditions with the same shapeof the samples, whereupon measurement was difficult in some cases.Measurement could be carried out with thin samples having a thickness ofa level of from 0.2 to 0.5 mm, and an extremely high value of 21.0 kV/mmwas obtained.

TABLE 10 Inversion voltage (unit: kV/mm) Not 0.05 0.10 0.20 0.50 1.003.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a 4.4 4.1 3.12.1 2.0 2.1 2.0 2.3 b 4.3 3.7 3.2 2.8 2.0 2.9 2.1 2.9 c 4.5 3.8 3.0 2.92.0 2.1 2.1 2.1 d 4.7 3.6 3.2 2.0 2.1 2.1 2.1 2.5

Then, from each single crystal obtained in the same manner as mentionedabove, samples of 5 mm×3 mm×2 mm in x, y and z azimuths respectively,were cut from the measurement positions a to d. Electrodes were formedon both z-axis surfaces, and the electrooptical constants of the sampleswere measured by using a Mach-Zehnder interferometer. The results areshown in Table 11. As shown in Table 11, it was clarified that some ofthese constants were extremely sensitive to the crystal composition.Namely, with respect to a LT single crystal having a molar fraction ofLi₂O/(Ta₂O₅+Li₂O) of at least 0.490 and less than 0.500, theelectrooptical constant r₁₃ would not increase as compared with theconventional LT single crystal of the congruent melting composition,however, r₃₃ would increase by at least about 6% to be about 33 pm/V,which is extremely high as compared with the value of about 32.2 pm/V ofthe LT single crystal of the congruent melting composition. Particularlywith respect to the electrooptical constant, such a tendency wasobserved that the closer to the stoichiometric composition, the higherthe constant. Further, with respect to the crystal having Mg addedthereto, the electrooptical constant further increased to be at least 34pm/V in the case where Mg was added in an amount of at least 0.1 mol %,and the maximum value of 35.5 pm/V was obtained in the crystal having Mgadded in an amount of about 1 mol %. On the other hand, theelectrooptical constant tended to gradually decrease along with theincrease of the addition amount of Mg exceeding 1 mol %.

TABLE 11 Electrooptical constant r₃₃ (unit: pm/V) Not 0.05 0.10 0.200.50 1.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % a33.0 33.7 34.1 34.5 35.1 35.5 35.4 35.3 b 33.2 33.6 34.0 34.4 34.7 35.435.2 35.1 c 33.1 33.8 34.1 34.4 34.8 35.2 35.3 35.3 d 33.2 33.6 34.134.3 35.0 35.4 35.2 35.4

EXAMPLE 7

Commercially available high purity material powders of Li₂O and Ta₂O₅were mixed to prepare a material having an excessive Li component with aratio of Li₂O:Ta₂O₅ of 0.56-0.60:0.44-0.40. The mixture was subjected torubber pressing under a hydrostatic pressure of 1 ton/cm², andcalcination in the atmosphere of about 1,050° C., to prepare a materialstick. Then, to grow a single crystal by single crucible method, i.e. byconventional CZ method, the prepared material stick of the materialhaving an excessive Li component, was preliminarily filled in acrucible, and the crucible was heated to prepare a melt having anexcessive Li component. In experiments to confirm the effect of Mgaddition, commercially available high purity MgO or MgCO₃ waspreliminarily filled in the crucible when the material stick was filled.With respect to the weight of MgO or MgCO₃ to be filled, fiveexperiments were carried out wherein the Mg concentration in the meltwas 0.1, 0.2, 0.5, 1.0 or 3.0 mol % (mol % is defined by[Mg]/([Mg]+[Li]+[Ta])×100 mol %). Further, experiments were carried outin the same manner except that MgO or MgCO₃ was not added, or the Mgconcentration was 0.05 or 0.5 mol %, for comparison. The crucible usedfor the growing was made of iridium, and had a cylindrical shape, adiameter of 150 mm and a height of 100 mm. The surface of the melt wasobserved by a video camera throughout the growing. A significant meltconvection was observed even when the crucible was not rotated, whichwas not seen in Example 6.

A crystal was grown from the surface of the melt at the center portionof the crucible. The temperature of the melt was stabilized to have apredetermined temperature, then a LT single crystal cut in Z-axisdirection, having a size of 5 mm×5 mm×length 70 mm, and in amonopolarization state, as a seed crystal 60, was contacted with themelt, and the crystal was rotated and pulled upward while controllingthe temperature of the melt, to grow a single crystal. The crucible wasnot rotated but fixed. The growing atmosphere was nitrogen containingoxygen in an amount of 1%. The rotation speed of the crystal wasconstant at 2 rpm, and the pulling rate was changed within a range offrom 0.5 to 3.0 mm/h. The weight of the crystal growth was measured by aload cell throughout the growing so as to prepare a wafer having adiameter of 2 inches from the grown crystal, and an automatic diametercontrol was carried out immediately after the seeding so that thediameter of the crystal was about 60 mm. For the growing in the presentExample, no supply of the material during the growing, as in the case ofusing the double crucible in Example 6, was carried out. The schematicview illustrating the obtained LT single crystal is shown in FIG. 3. Inboth case where no Mg was added and case where Mg was added in eachconcentration, when pulling was carried out with a diameter of 60 mm, atransparent single crystal portion 61 was grown immediately after theinitiation of the growing until the crystal had grown to have a lengthof about 30 mm. Then, the eutectic point was attained, and the portionwhich was pulled after the eutectic point was attained, was not the LTsingle crystal but a polycrystal layer 62.

With respect to each crystals obtained, the molar fraction ofLi₂O/(Ta₂O₅+Li₂O) was obtained from chemical analysis. For thedetermination of measurement positions, measurement position g was aposition on the center axis of the crystal distanced by 5 mm from theseed crystal 60, and two additional measurement positions h and i weretaken along the center axis at positions distanced by every 10 mm fromthe position g in the direction away from the seed crystal. Eachmeasurement sample was cut into 7 mm cubes centering with themeasurement positions. The results of measuring the molar fraction ofLi₂O/(Ta₂O₅+Li₂O) are shown in Table 12. Further, the samples weremeasured with respect to the Mg content, and it was confirmed that theMg content in the crystal was substantially the same as theconcentration of Mg added to the melt.

TABLE 12 Molar fraction of Li₂O/(Ta₂O₅ + Li₂O) Not 0.05 0.10 0.20 0.501.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g 0.4880.486 0.492 0.494 0.494 0.490 0.492 0.491 h 0.493 0.492 0.494 0.4970.497 0.493 0.493 0.493 i 0.497 0.497 0.498 0.499 0.499 0.493 0.4970.497

Then, the nonlinear optical constants of these samples were measured byusing wedge method. The results of the measurements are shown in Table13. As shown in Table 13, it is evident that in the case where theamount of Mg was less than 0.1 mol %, the nonlinear optical constant d₃₃gradually increased from the portion close to the seed crystal to theportion of the eutectic point. This increase is considered to beattributable to the fact that the material was not supplied during thegrowing, whereby the composition ratio of the melt changed with time. Onthe other hand, in the case where the addition amount of Mg was at least0.1 mol %, such an increase shown in the case where the amount was lessthan 0.1 mol %, was not observed. The nonlinear optical constant d₃₃ wassubstantially constant among the measurement positions g to i withdistance of 10 mm, and when the amount was at least 0.2 mol %, theentire crystal substantially uniformly showed the maximum value of atleast 15 pm/V.

TABLE 13 Nonlinear optical constant d₃₃ (unit: pm/V) Not 0.05 0.10 0.200.50 1.00 3.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g13.9 14.3 15.6 15.7 15.7 15.8 15.8 16.1 h 14.6 14.9 15.7 15.8 16.0 16.115.9 15.9 i 15.8 16.0 15.9 16.1 16.1 16.1 16.1 16.0

Then, single crystals were produced in the same manner as mentionedabove, and z-plate samples having a cross-section of 10 mm×10 mm and athickness of 1.0 mm were cut from the measurement positions g to i.Electrodes were formed on both z-axis surfaces, and the voltage wasapplied thereto, whereupon the voltage required for the polarizationinversion of the crystal was measured. The results of the measurementsare shown in Table 14. From Table 14, it was found that the polarizationinversion voltage gradually decreased from the portion close to the seedcrystal toward the portion of the eutectic point, in the case where theaddition amount of Mg was less than 0.1 mol %. This decrease isconsidered to be attributable to the fact that the material was notsupplied during the growing, whereby the composition ratio of the meltchanged with time. On the other hand, in the case where the additionamount of Mg was at least 0.1 mol %, such a decrease as shown in thecase where it was less than 0.1 mol %, was not observed, the inversionvoltage was at most 0.5 kV/mm among the measurement positions g to iwith a distance of 10 mm, and when the addition amount was at least 0.2mol %, the entire crystal substantially uniformly showed the minimumvalue of 1.5 kV/mm.

TABLE 14 Inversion voltage (unit: kV/mm) Not 0.05 0.10 0.20 0.50 1.003.00 5.00 added mol % mol % mol % mol % mol % mol % mol % g 5.3 3.2 1.81.7 1.7 1.6 1.7 1.8 h 2.8 2.4 1.7 1.6 1.8 1.6 1.5 1.7 i 1.6 1.7 1.7 1.61.7 1.5 1.6 1.7

EXAMPLE 8

Various optical functional elements were prepared by periodicallyinverting polarization of the LT single crystals obtained in the samemanner as in Example 6. Here, preparation of a QPM element generatingblue or green light to the fundamental wave of near infrared lighthaving a wavelength of 840 nm or 1,064 nm, will be shown below. Waferswere cut from each of the crystals having Mg added in eachconcentration, obtained in Example 6. The wafers had a diameter of 2inches and a thickness of 0.3 mm, 0.5 mm, 1.0 mm, 2.0 mm or 3.0 mm.Polishing was applied to both sides, and the wafers were cut into z-axisazimuth, and a pectinate pattern was formed with an electrode of a Crfilm having a thickness of 500 nm on the +z surface by means oflithography. The periods of the electrode were 3.0 μm and 6.8 μm toobtain a primary QPM structure so as to generate a harmonic of blue andgreen light with a high efficiency. Then, an insulating film having athickness of 0.5 μm was overcoated on the +z surface, followed bypreservation treatment at a temperature of 350° C. for 8 hours. Then,the crystal was sandwiched between the electrodes by means of an aqueouslithium chloride electrolyte on both z-surfaces, and a high voltagepulse was applied thereto. The current through the LT single crystal wasmonitored with a resistance of 1 kΩ.

A polarization inversion grating was formed, and then the y-surfaces ofthe crystal to be side surfaces, were polished and etched by a mixedsolution of hydrofluoric acid and nitric acid, and the appearance of thepolarization inversion grating was observed. The pulse duration and theelectric current of the applied voltage were optimized by repeating thepolarization inversion and the observation with respect to each sample,to adjust the polarization inversion grating width ratio and the mode ofthe polarizations inversion to be ideal 1:1 (1:0.95-1) over all samples.

As a result of the experiments, a polarization inversion grating widthratio of substantially 1:1 was obtained with respect to most sampleshaving a thickness of 0.3 mm, 0.5 mm, 1.0 mm, 2.0 mm or 3.0 mm. However,the ratio of substantially 1:1 could not be obtained with respect to thecrystal having a Mg concentration of higher than 3 mol %. Specifically,such a tendency was observed that linearity of the polarizationinversion was poor, and the adjacent polarizations were connected witheach other in many portions. This is considered to be attributable tothe fact that since the Mg concentration was too high, the electricalresistance decreased and minute application of periodic voltage becamedifficult, whereby the crystal became heterogeneous, and portionscontaining a particularly large amount of Mg inhibited the linearity ofthe polarization inversion. Namely, it is preferred to adjust theconcentration of Mg to be at most 3 mol %, in the case of preparing anelement for polarization inversion.

EXAMPLE 9

Optical functional elements having a polarization inversion grating wereprepared in the same manner as in Example 8 except that the diameter was2 inches and the thickness was 1.0 mm. In order to obtain thepolarization inversion grating width of 5 μm, the polarization inversiongrating width ratio was adjusted to be close to ideal 1:1 (1:0.95-1). Asa result of experiments, the polarization inversion grating width ratioof substantially 1:1 (1:0.95-1) could be obtained with respect to mostsamples, however, it could not be obtained with respect to the crystalhaving a Mg concentration of higher than 3 mol %.

EXAMPLE 10

A polarization inversion structure of a lens or a prism was formed onthe LT single crystal prepared in Example 6, to prepare an opticalelement such as a cylindrical lens, a beam scanner or a switch or apolarization element utilizing the electrooptical effect. A LT singlecrystal having a diameter of 2 inches and a thickness of from 0.2 to 2.0mm, having both surfaces polished and z-cut, was prepared, and Alelectrodes of about 200 μm were formed by sputtering and a pattern of alens or a prism was formed by means of lithography on both z-surfaces.Then, a pulse voltage of about 3.5 KV/mm was applied to the +z-surfacefor polarization inversion. Further, heat treatment was applied at 500°C. for about 5 hours in the air, to eliminate non-uniformity of therefractive index introduced by the polarization inversion. Further,mirror polishing was applied to the edge surface of the crystal, toobtain the incoming and outgoing face for laser light. The performancesof the optical element utilizing the electrooptical effect of the LTsingle crystal forming inversion of the refractive index by thepolarization inversion structure made by way of trial, were determinedby the design for the polarization inversion structure of a lens or aprism, the accuracy of the preparation process for the polarizationinversion structure, or the degree of the electrooptical constant whichthe material had. Here, the polarization inversion structure of thepattern of a lens or a prism was characterized by that good elementcharacteristics were obtained since the polarization inversion wasextremely easily controlled. With respect to the conventional LT crystalof the congruent melting composition, a large applied voltage wasrequired for polarization inversion, whereby it has been difficult tocontrol the polarization inversion structure. Further, with respect tothe conventional LT crystal of the congruent melting composition or theLT single crystal having at least 5 mol % of MgO added thereto, theinversion of the spontaneous polarization was poorly controlled, wherebyit has been difficult to form a polarization inversion structure of alens or a prism with a high accuracy. Such problems were not observed inthe case where an optical element such as a cylindrical lens, a beamscanner or a switch or a polarization element utilizing theelectrooptical effect, was prepared by forming a polarization inversionstructure of a lens or a prism on the LT single crystal prepared inExample 6. Further, the crystal of Example 6 had an electroopticalconstant r₃₃ higher than that of the crystal of the congruent meltingcomposition, whereby more excellent device performance was obtained witha smaller operating voltage. For example, in the case of thepolarization element, a large polarization angle of about 6° wasobtained with a voltage of about 600 V/mm. Further, a lens operating inthe vicinity of about 100 V/mm and a switching operation at about 500V/mm were obtained.

In the above Examples, the voltage applying method has been described indetail as Examples illustrating the polarization inversion at atemperature lower than the curie point. However, according to thepresent invention, an optical element having a periodic polarizationinversion grating formed with a high accuracy will be realized by usinga LT single crystal of the stoichiometric composition excellent incontrolling and the level of performance of the crystal, even byemploying another method such as 1) Ti internal dispersion method, 2)SiO₂ loading heat treatment method, 3) proton exchange heat treatmentmethod, or 4) electron beam scanning irradiation method.

Further, detailed explanation has been made with respect to Exampleswherein the QPM element generating blue or green light to thefundamental wave of infrared light having a wavelength of 840 nm or1,064 nm was prepared. However, according to the present invention, thefundamental wave is not restricted to the two wavelengths, and thepresent invention may be applied to the longer wavelength region atwhich the LT single crystal is transparent and the phase matching can becarried out. Further, the optical functional element of the presentinvention for periodically inverting the polarization structure of thesingle crystal of lithium tantalate, and changing the wavelength of theincoming laser having a wavelength at from visible to near infraredregion, to be shorter or longer, can be applied to not only a secondharmonic generating element but also an optical parametric oscillatingelement in various fields for e.g. remote sensing and gas detecting.

EXAMPLE 11

Commercially available high purity Li₂CO₃ and Nb₂O₅ material powders(purity: 99.99% respectively) were mixed in such a proportion ofLi₂CO₃:Nb₂O₅ of 0.56-0.60:0.44-0.40, to obtain a material having anexcessive Li component. Further, the material powders were mixed in sucha proportion of Li₂CO₃:Nb₂O₅ of 0.50:0.50, to obtain a material of thestoichiometric composition. Then, the mixtures were subjected to rubberpressing under a hydrostatic pressure of 1 ton/cm and calcination in theair of about 1,050° C. to prepare materials. The mixed material of thestoichiometric composition to be a powder material for continuoussupply, was further calcinated in the air of about 1,150° C. followed bypulverization, and classified into a size within a range of from 50 μmto 500 μm.

Then, the obtained material having an excessive Li component waspreliminarily filled in an inner crucible and an outer crucible, and thecrucible was heated to prepare a melt having an excessive Li component.A double crucible used in Example 11 had such a structure that in anouter crucible 35 arranged in a rotation pulling furnace 47, a cylinder36 (hereinafter referred to as inner crucible) having a height higher by7.5 mm than the outer crucible 35 was arranged, and three large holeshaving a size of about 20 mm×about 30 mm, for connecting the outercrucible 35 with the inner crucible 36, were provided at the bottom ofthe inner crucible 36 at positions symmetric to the center axis of theinner crucible 36. A platinum crucible was used for the inner crucible36 and the outer crucible 35.

The shape of the double crucible was such that the ratio of the heightto the diameter of the outer crucible 35 was 0.45, and the ratio indiameter of the inner crucible to the outer crucible was 0.8. The outercrucible 35 had a diameter of 150 mm and a height of 67.5 mm, and theinner crucible 36 had a diameter of 120 mm and a height of 75 mm.Between the inner crucible 36 and the outer crucible 35, there was aspace of about 15 mm, and a material supply tube 37 was stably arrangedso that the material would smoothly fall to said space.

The crucible was heated by a high frequency oscillating coil 43, and theappearance of the surface of the melt 41 was observed by a video camera.Substantially no convection was observed on the surface of the melt 41if the crucible was not rotated. However, it was observed that forcedconvection of the melt 41 became significant along with the gradualincrease in the rotation speed of the crucible by a crucible rotationmechanism 50, and the effect of the rotation of the crucible wasconfirmed.

Then, a crystal was grown from the melt 41 having an excessive Licomponent with a molar fraction of Li₂O/(Nb₂O₅+Li₂O) of 0.59. Thetemperature of the melt 41 was stabilized to the predeterminedtemperature, then a LN single crystal cut into Z-axis direction, havinga size of 5 mm×5 mm×length 70 mm and in a monopolarization state, as aseed crystal 40, was attached to a crystal pulling shaft 38 andcontacted with the melt 41, and the seed crystal 40 was rotated andpulled upward by a lifting and lowering head 39 while controlling thetemperature of the melt 41, to grow a single crystal. The growingatmosphere was in the air. The rotation rate of the crystal was constantat 2 rpm, and the puling rate was changed within a range of from 0.5 to3.0 mm/h.

Automatic diameter control was carried out immediately after seeding byusing a diameter controlling system 48 so that the diameter of thecrystal was about 60 mm in order to prepare a wafer having a diameter of2 inches from a grown crystal 42. The growth weight of the grown crystal42 was measured by means of a load cell as a weight measuring sensor 44,and a material powder 45 of the stoichiometric composition with a molarfraction of Li₂O/(Nb₂O₅+Li₂O) of 0.50, in an amount corresponding to theamount of crystal growth, was automatically supplied to the outercrucible 35 by means of a material supply system 49 through the supplytube 37. Here, the amount of change in the crystal growth was obtainedby a computer, and the supply of the material in the same amount as thecrystal growth was initiated before the diameter control was stabilizedafter the seeding. Accordingly, the supply rate of the material wascontrolled to be within a range of from about 60 to about 2,500 mg/min.

The material was supplied in such a manner that the powder material 45preserved in a closed container 46 equipped with a weight measuringsensor and arranged on the rotation pulling furnace 47, was suppliedthrough the supply tube 37 made of ceramics or a noble metal. The supplytube 37 was arranged so that the angle to the vertical was larger than76°. A gas was flowed to the supply tube 37 and the closed container 46at a rate of from 50 to 500 cc/min. The flow rate of the gas wasoptimized within a range of from 50 to 500 cc/min depending upon theparticle size (50 to 500 μm) and the amount of the material supplied perunit time (about 60 to about 250 mg/min). In the case of growing a LNsingle crystal having a diameter of 2 inches, the powder material 45selected to have a particle size of as constant as possible within arange of from 80 to 100 μm was used, and the flow rate of the gas wasadjusted to be 200 cc/min, to realize a smooth supply of the materialwithout scattering of the material powder nor the clogging of the supplytube 37.

According this method, the material was continuously and smoothlysupplied to the crucible, and a crystal could be grown from the melt 41having the depth and the composition kept to be always constant, wherebya large single crystal having a homogeneous composition and a diameterof at least 2 inches could be easily grown.

Further, by rotating the noble metal double crucible during the growing,the convection of the melt 41 was forcibly controlled so that thecrystal growth interface was flat or convex to the melt surface,simultaneously with homogenization of the melt 41 and the powdermaterial 45 supplied. Particularly in the case of growing a crystalhaving a diameter of at least 2 inches, if the double crucible structureis employed, the growth interface is likely to be concave in the casewhere the temperature gradient of the melt in the inner crucible in thediameter direction is extremely gentle. However, the growth interfacecould be controlled to be flat by rotating the crucible at from about 2to about 4 rpm, or to be convex by rotating the crucible at from about 7to about 8 rpm.

To grown a LN single crystal of high quality having a diameter of 2inches, the entire double crucible was arranged in an alumina ceramicrefractory, and the refractory having the double crucible arrangedtherein was arranged on a rotatable stand and rotated. The effect of theconvection of the melt 41 was observed in both case where the cruciblewas rotated in the same direction as the rotation of the crystal and thecase where the crucible was rotated in the opposite direction, and alongitudinal crystal of high quality could be pulled up stably. Acolorless and transparent LN crystal having a diameter of 60 mm and alength of 110 mm and having no crack was obtained by growing of about1.5 weeks. The obtained as-grown crystal was cut in various directions,and the inside domain state was observed, whereupon it was confirmedthat the inside was in homogeneously single domain state except fornegligible portion near the surface of the crystal.

Further, in the case where the double crucible was arranged so that theheight of the inner crucible 36 was equal to or higher than the heightof the outer crucible 35, the heating temperature at the upper part ofthe inner crucible 36 becomes low as compared with the outer crucible35, and most of the melt 41 would be solidified on the wall of the innercrucible 36 during a step of cooling the melt after the pulling of thecrystal had been completed, whereby the wall of the outer crucible 35made of a noble metal was free from a solid, and accordingly, thedeformation of the crucible due to application of stress was minimized.

After 10 times of continuous growing, the crucible was taken off fromthe alumina ceramic refractory, and the appearance was checked,whereupon the crucible was hardly deformed as compared with the shape ofa new one, and it was confirmed that the outer crucible 35 was hardlydeformed even after the continuous growing of 30 times. Accordingly, onecrucible would be used repeatedly for more times, and the production ofan oxide single crystal by using an expensive noble metal could becarried out at a significantly lower cost.

EXAMPLE 12

Commercially available high purity Li₂CO₃ and Ta₂O₅ material powders(purity: 99.99% respectively) were mixed in such a proportion ofLi₂CO₃:Ta₂O₅ of 0.56-0.60:0.44-0.40, to obtain a material having anexcessive Li component. Further, the material powders were mixed in sucha proportion of Li₂CO₃:Ta₂O₅ of 0.50:0.50, to obtain a material of thestoichiometric composition. Then, the mixtures were subjected to rubberpressing under a hydrostatic pressure of 1 ton/cm² and calcination inthe air at a temperature of about 1,050° C. to prepare material sticks.The mixed material of the stoichiometric composition to be a powdermaterial for continuous supply, was further calcinated in the air ofabout 1,350° C. followed by pulverization, and classified into a sizewithin a range of from 50 μm to 500 μm.

Then, the obtained material having an excessive Li component waspreliminarily filled in an inner crucible and an outer crucible, and thecrucible was heated to prepare a melt having an excessive Li component.Here, detailed phase diagram required for growing the LT crystal of thestoichiometric composition was not clarified, and presuming that it issimilar to the phase diagram of the LN crystal, when a crystal was grownfrom a melt having a significantly excessive Li component (e.g. molarfraction of Li₂/(Ta₂O₅+Li₂O):0.56-0.60), a single crystal of acomposition in the vicinity of the stoichiometric composition (molarfraction of Li₂/(Ta₂O₅+Li₂O):0.50), i.e. a single crystal wherein thenonstoichiometric defect concentration was suppressed to be as low aspossible, will be obtained. If the composition of the crystal to begrown and the composition of the melt are different, the compositionswill be more different along with the progress of the growing by theconventional pulling method, whereby it will be difficult to grow acrystal. Accordingly, the method for producing a single crystal by meansof the apparatus for growing a single crystal by the double cruciblemethod of the present invention, as schematically shown in FIG. 1, wasemployed in order to precisely control the structure and the density ofthe nonstoichiometric defects.

The structure of the double crucible in the present Example was suchthat in the outer crucible 35, the inner crucible 36 having a heighthigher by 5 mm than the outer crucible 35 was arranged, and three largeholes having a size of about 15 mm×20 mm were arranged on the bottom ofthe inner crucible 36 at the same positions as in Example 11. An iridiumcrucible was used as the inner crucible 36 and the outer crucible 35.The shape of the double crucible used was such that the ratio of theheight to be diameter of the outer crucible 35 was 0.50, and the ratioin diameter of the inner crucible to the outer crucible was 0.8. Theouter crucible 35 had a diameter of 150 mm and a height of 75 mm, andthe inner crucible 36 had a diameter of 120 mm and a height of 80 mm.Between the inner crucible 36 and the outer crucible 35, there was spaceof about 15 mm, and the material supply tube 37 was stably arranged sothat the material would smoothly fall to said space.

The appearance of the surface of the melt 41 was observed by a videocamera. A weak convection was slightly observed on the surface of themelt 41 if the crucible was not rotated. However, it was observed thatthe forcible convection of the melt 41 became significant along with thegradual increase of the rotation speed of the crucible, and the effectof the rotation of the crucible was confirmed.

Then, a crystal was grown from the melt 41 having an excessive Licomponent with a molar fraction of Li₂O/(Ta₂O₅+Li₂O) of 0.60. Thetemperature of the melt was stabilized to the predetermined temperature,then a LT single crystal cut in Y-axis direction having a size of 5 mm×5mm×length 50 mm as a seed crystal 40 was contacted with the melt 41, anda single crystal was grown by rotating the crystal and pulling it upwardwhile controlling the temperature of the melt 41. The seedingtemperature measured by a thermocouple arranged to a portion close tothe crucible, was in the vicinity of 1,450° C. An Ir crucible was usedsince the growing was carried out at a high temperature, and accordinglythe growing atmosphere was in the reduced atmosphere. The rotation rateof the crystal was changed within a range of from 2 to 4 rpm, and thepulling rate was changed within a range of from 0.5 to 3.0 mm/h.Automatic diameter control was carried out immediately after the seedingso that the diameter of the crystal was about 60 mm in order to preparea wafer having a diameter of 2 inches from the grown crystal 42. Thegrowth weight of the grown crystal 42 was measured by a load cell, andthe material of the stoichiometric composition with a molar fraction ofLi₂O/(Ta₂O₅+Li₂O) of 0.50 was automatically supplied to the outercrucible 35 in an amount corresponding to the amount of the crystalgrowth. Here, the amount of change in the crystal growth was obtained bya computer, and the supply of the material in the same amount as thecrystal growth was initiated before the diameter control was stabilizedafter the seeding. Accordingly, the supply rate of the material wascontrolled to be within a range of from about 120 to about 5,000 mg/min.

The material was supplied in such manner that a powder material 45preserved in a closed container 46 equipped with a weight measuringsensor and arranged on a rotation pulling furnace 47, was suppliedthrough the supply tube 37 made of ceramics or a noble metal. The supplytube 37 was arranged so that the angle to the vertical was at least 80°.A gas was flowed to the supply tube 37 and the closed container 46 at arate of from 50 to 500 cc/min. The flow rate of the gas was optimized tobe within a range of from 50 to 500 cc/min depending on the particlesize (50 to 500 μm) and the amount of the powder material per unit time(about 120 to about 5,000 mg/min). In the case of growing a LT singlecrystal having a diameter of 2 inches, the supply material selected tohave a particle size of as constant as possible within a range of from100 to 200 μm, was used, and the flow rate of the gas was adjusted to be150 cc/min, whereby the material was smoothly supplied withoutscattering of the powder material nor the clogging of the supply tube37. According to this method, the material could be continuously andsmoothly supplied to the crucible, and the crystal could be grown fromthe melt 41 having the depth and the composition kept to be alwaysconstant, and accordingly, a large single crystal having a diameter ofat least 2 inches and a homogeneous composition could be grown easily.

Further, the convection of the melt 41 was forcibly controlled so thatthe crystal growth interface was flat or convex to the liquid surface,simultaneously with the homogenization of the melt 41 and the powdermaterial 45 supplied, by rotating the noble metal double crucible.Particularly in the case of growing a crystal having a diameter of atleast 2 inches, when the double crucible structure was employed, thegrowth interface was likely to be concave in the case where thetemperature gradient of the melt in the inner crucible in the diameterdirection was extremely gentle. However, the grown interface could becontrolled to be flat or concave by rotating the crucible at from about1 to about 3 rpm. In the case of growing the LT single crystal, thegrowth interface tended to be convex even if the rotation speed of thecrucible was low, as compared with the case of growing the LN singlecrystal.

To grow a LT single crystal of high quality having a diameter of 2inches, the entire double crucible was arranged in the zirconiumrefractory, and the refractory having the double crucible arrangedtherein was arranged on a rotatable stand and rotated. The effect of theconvection of the melt 41 was observed in both case where the cruciblewas rotated in the same direction as the rotation of the crystal, andthe case where it was rotated in the opposite direction, and alongitudinal crystal of high quality could be stably pulled up. Acolorless and transparent LT crystal having a diameter of 60 mm and alength of 90 mm and having no crack was obtained by the growing of about1.5 weeks.

Further, the iridium double crucible was arranged so that the height ofthe inner crucible 36 was equal to or higher than the height of theouter crucible 35, whereby the heating temperature at the upper part ofthe inner crucible 36 becomes lower than the outer crucible 35, and themelt 41 was solidified on the wall of the inner crucible 36 during astep of cooling the melt 41 after the pulling of the crystal had beencompleted, and accordingly, deformation of the outer crucible 35 made ofa noble metal due to application of stress by a solid, could beminimized. After a continuous growing of 8 times, the crucible was takenout from the zirconium refractory, and the appearance was checked,whereupon the shape was hardly deformed as compared with the shape of anew one, and it was confirmed that the shape was hardly deformed evenafter the continuous growing of 20 times. Accordingly, the production ofan oxide single crystal by using an expensive noble metal could becarried out at a significantly lower cost. Iridium is susceptible todeformation, has a poor processability, and is extremely expensive, ascompared with platinum, whereby to overcome the problem of deformationby the double crucible method is significantly advantageous to producean oxide single crystal at a low cost.

EXAMPLE 13

A single crystal was grown by applying the double crucible method to thegrowing of a LT single crystal of the congruent melting compositionhaving a large diameter, which has conventionally been produced also byCzochralski method. Commercially available material powders of Li₂CO₃and Ta₂O₅ (purity: 99.9% respectively) were mixed in the ratio ofLi₂CO₃:Ta₂O₅ of 0.485 to prepare a material of the congruent meltingcomposition, followed by rubber pressing under a hydrostatic pressure of1 ton/cm² and calcination in the air of about 1,050° C. to prepare amaterial stick. Further, a mixed material of the stoichiometriccomposition to be a powder material for continuous supply was calcinatedin the air of about 1,350° C., followed by pulverization, and classifiedinto a size within a range of from 200 μm to 500 μm.

Then, the prepared material of the congruent melting composition waspreliminarily filled in an inner crucible and an outer crucible, and thecrucible was heated to prepare a melt. In the case of the congruentmelting composition, the temperature at which the entire material meltedwas about 1,650° C., which was higher by about 200° C. than the case ofthe crystal of the stoichiometric composition.

The structure of the double crucible was such that in the outer crucible35, the inner crucible 36 having a height of higher by 6 mm than theouter crucible 35 was arranged, and three large holes having a size ofabout 15 mm×about 30 mm and connecting the outer crucible 35 with theinner crucible 36, were provided on the bottom of the inner crucible 36in the same positions as in Example 11.

In Example 13, an iridium crucible was employed. The shape of the doublecrucible was such that the ratio of the height to be diameter of theouter crucible 35 was 0.40, and the ratio in diameter of the innercrucible to the outer crucible was 0.8. The outer crucible 35 had adiameter of 160 mm and a height of 64 mm, and the inner crucible 36 hada diameter of 128 mm and a height of 70 mm. Between the inner crucible36 and the outer crucible 35, there was a space of about 16 mm, and amaterial supply tube 37 was stably arranged so that the material wouldsmoothly fall to said space.

The appearance of the surface of the melt 41 was observed by a videocamera. A weak convection was slightly observed on the surface of themelt 41 if the crucible was not rotated, and it was observed that theforcible convection on the melt 41 became significant along with agradual increase of the rotation speed of the crucible, and the effectof the rotation of the crucible was confirmed.

Then, a crystal was grown from the melt 41 of the congruent meltingcomposition with a molar fraction of Li₂O/(Ta₂O₅+Li₂O) of 0.485. Thetemperature of the melt 41 was stabilized to the predeterminedtemperature, and a LT single crystal cut in Y-axis direction and havinga size of 8 mm×8 mm×length 70 mm as a seed crystal 40 was contacted withthe melt 41, and the crystal was rotated and pulled upward whilecontrolling the temperature of the melt 41, to grow a single crystal.The growing atmosphere was in a nitrogen atmosphere containing a smallamount of oxygen. The rotation rate of the crystal was 5 rpm, and thepulling rate was from 3 to 7 mm/h.

An automatic diameter control was carried out immediately after theseeding so that the diameter of the crystal was about 85 mm in order toprepare a wafer having a diameter of 3 inches from the grown crystal 42.The growth weight of the grown crystal 42 was measured by a load cell,and the material of the congruent melting composition was automaticallysupplied to the outer crucible 35 in an amount corresponding to thecrystal growth. Here, the composition of the growing crystal, thecomposition of the melt 41 and the composition of the supply materialwere all the same congruent melting composition, whereby the supply ofthe material was initiated when the diameter control was stabilized.Accordingly, the supply rate of the material was controlled within arange of from 2,000 to 5,500 mg/min.

The material was supplied in such a manner that the powder material 45preserved in a closed container 46 equipped with a weight measuringsensor and arrange on a rotation pulling furnace 47, was suppliedthrough a supply tube 37 made of ceramics or a noble metal. The supplytube 37 was arranged so that the angle to the vertical was about 78°.The gas was flowed to the supply tube 37 and the closed container 46 ata rate of from 100 to 500 cc/min to carry out smooth material supply.The flow rate of the gas was optimized within a range of from 100 to 200cc/min depending upon the particle size (200 to 500 pm) and the amountof the powder material per unit time (about 2,000 to about 5,500mg/min). In the case of growing a LT single crystal having a diameter of3 inches, the supply material was selected to have a particle size of aslarge as at least 200 μm, whereby the material could be smoothlysupplied without scattering of the powder material nor the clogging ofthe supply tube 37, with a flow rate of the gas of a level of 200cc/min. According to this method, the material could be continuously andsmoothly supplied to the crucible, and the crystal could be grown fromthe melt 41 having the depth always kept to be constant, whereby growingof a longitudinal and large single crystal having the depth ahomogeneous composition could be easily carried out. Further, theconvection of the melt 41 was forcibly controlled so that the crystalgrowth interface was flat or convex to the liquid surface by rotatingthe noble metal double crucible during the growing. Particularly in thecase of growing a crystal having a diameter of at least 3 inches, if thedouble crucible structure was employed, the growth interface was likelyto be concave in the case where the temperature gradient of the melt inthe inner crucible in the diameter direction was extremely gentle,however, the growth interface could be made flat or convex by rotatingthe crucible. In the case of growing the LT single crystal, the growthinterface tended to be convex with a lower rotation rate of the crucibleas compared with the case of growing the LN single crystal. In the caseof the crystal of the congruent melting composition, the growth rate washigh, and the diameter was large, whereby the amount of the powdermaterial 45 supplied was large, and accordingly, the homogenization ofthe melt 41 and the supply material by the rotation of the crucible wasmore important. A colorless and transparent LT crystal having a diameterof 85 mm and a length of 100 mm and having no crack was easily obtainedby the growing of about a week.

Then, the deformation of the iridium double crucible when cooled wasobserved. Since the double crucible was arranged so that the height ofthe inner crucible 36 was equal to or higher than the height of theouter crucible 35, the melt 41 was deposited and solidified on the wallof the inner crucible 36 during a step of cooling the melt 41 after thepulling of the crystal had been completed, and accordingly thedeformation of the outer crucible 35 made of a noble metal due toapplication of stress by a solid was minimized. After the continuousgrowing of several times, the crucible was taken out from therefractory, and the appearance was checked, whereupon it was confirmedthat the crucible was hardly deformed as compared with the shape of anew one. Accordingly, it is expected that the production of an oxidesingle crystal having a large diameter by using an extremely expensivenoble metal will be carried out at a significantly low cost. Iridium issusceptible to deformation, has a poor processability and is extremelyexpensive as compared with platinum, whereby it is considered that toovercome the problem of deformation by the double crucible method issignificantly advantageous to produce an oxide single crystal at a lowcost.

As mentioned above, according to the present invention, a LN crystalhaving the nonlinear optical constant, polarization inversion voltageand electrooptical constant which a LN crystal with a molar fraction ofLi₂O/(Nb₂O₅+Li₂O) of 0.500 has, will be obtained with a high efficiency,without completely adjusting the molar fraction of the LN crystal ofLi₂O/(Nb₂O₅+Li₂O) to be 0.500. Likewise, a LT crystal having thenonlinear optical constant, polarization inversion voltage andelectrooptical constant which a LT crystal with a molar fraction ofLi₂O/(Ta₂O₅+Li₂O) of 0.500 has, will be obtained with a high efficiency,without completely adjusting the molar fraction of the LT crystal ofLi₂O/(Ta₂O₅+Li₂O) to be 0.500. By utilizing the above, a LN or LTcrystal of the stoichiometric composition having the maximumfrequency-conversion characteristic and electrooptical characteristicover the entire crystal, will be grown. In the above Examples, Mg wasused as the third element. However, it was confirmed that the similarresults were obtained by using Zn, Sc or In.

Further, according to the present invention, in the growing of a singlecrystal by using a high frequency induction heating, by employing anoble metal double crucible, optimizing its shape, rotating thecrucible, providing a material supply apparatus and improving the methodfor supplying the material, a high quality crystal of the congruentmelting composition or another composition, having a large diameter andbeing longitudinal, which has conventionally been considered to bedifficult to produce, will be stably grown, and further, the problem ofdeformation of the crucible due to growing can be overcome, andaccordingly, the process for producing an oxide single crystal at a lowcost can be provided.

What is claimed is:
 1. A single crystal of lithium niobate or lithiumtantalate, grown from a melt of a composition having a molar excess ofLi over a stoichiometric composition of lithium niobate or lithiumtantalate, and having a molar fraction of Li₂O/(Nb₂O₅+Li₂O) orLi₂O/(Ta₂O₅+Li₂O) within a range of at least 0.490 and less than 0.500,and the single crystal has at least one element selected from the groupconsisting of Mg, Zn, Sc and In in an amount of from 0.1 to 3.0 mol %based on the total amount of the elements, Nb and Li, or the totalamount of the elements, Ta and Li.
 2. The single crystal according toclaim 1, wherein the single crystal is lithium niobate.
 3. The singlecrystal according to claim 2, which has a nonlinear optical constant d₃₃of at least 26 pm/V at a wavelength of 1.064 μm.
 4. The single crystalaccording to claim 2, wherein the applied voltage required forpolarization inversion at room temperature is less than 3.7 kV/mm. 5.The single crystal according to claim 2, which has an electroopticalconstant r₃₃ of at least 36 pm/V at a wavelength of 0.633 μm.
 6. Anoptical element for converting the frequency of laser light comprisingthe single crystal of claim 2, wherein quasi phase matching is carriedout in such a state that the ferroelectric polarization of the singlecrystal is inverted.
 7. The optical element according to claim 6, whichhas a thickness in the Z axis direction of the element of at least 1.0mm, and a period of polarization inversion of at most 30 μm.
 8. Theoptical element according to claim 6, which has a period of polarizationinversion of at most 5 μm.
 9. An optical element for controlling laserlight comprising the single crystal of claim 2, wherein polarization,focusing and switching of light are carried out by utilizing a change inrefractive index of such a structure whereby the ferroelectricpolarization of the single crystal is inverted.
 10. The single crystalaccording to claim 1, wherein the crystal is lithium tantalate.
 11. Thesingle crystal according to claim 10, which has a nonlinear opticalconstant d₃₃ of at least 15 pm/V at a wavelength of 1.064 μm.
 12. Thesingle crystal according to claim 10, wherein the applied voltagerequired for polarization inversion at room temperature is less than 3.5kV/mm.
 13. The single crystal according to claim 10, which has anelectrooptical constant r₃₃ of at least 34 pm/V at a wavelength of 0.633μm.
 14. An optical element for converting the frequency of laser lightcomprising the single crystal of claim 10, wherein quasi phase matchingis carried out in such a state that the ferroelectric polarization ofthe single crystal is inverted.
 15. The optical element according toclaim 14, which has a thickness in the Z axis direction of the elementof at least 1.0 mm, and a period of polarization inversion of at most 30μm.
 16. The optical element according to claim 14, which has a period ofpolarization inversion of at most 5 μm.
 17. An optical element forcontrolling laser light comprising the single crystal of claim 10,wherein polarization, focusing and switching of light are carried out byutilizing a change in refractive index of such a structure whereby theferroelectric polarization of the single crystal is inverted.
 18. Asingle crystal of lithium niobate or lithium tantalate, grown from amelt of a composition having a molar excess of Li over a stoichiometriccomposition of lithium niobate or lithium tantalate, and having a molarfraction of Li₂O/(Nb₂O₅+Li₂O) or Li₂O/(Ta₂O₅+Li₂O) within a range of atleast 0.490 and less than 0.500, and the single crystal has at least oneelement selected from the group consisting of Sc and In in an amount offrom 0.1 to 3.0 mol % based on the total amount of the elements Nb andLi, or the total amount of the elements Ta and Li.